CAPACITANCE DETECTION TYPE MOVABLE SENSOR

Title:

CAPACITANCE DETECTION TYPE MOVABLE SENSOR

Document Type and Number:

WIPO Patent Application WO/2010/001947

Kind Code:

A1

Abstract:

Provided is a thin and compact movable sensor capable of detecting the amount of movement of a movable portion with high precision. A first movable portion (2) and a second movable portion (4) are coupled by a coupling link portion (10a) and a support link portion (20a), and when the first movable portion (2) moves closer to a fixed portion (50), the second movable portion (4) moves away from the fixed portion (50). The fixed portion (50) is provided with a first fixed electrode (51) and a second fixed electrode (52), a first movable electrode facing the first fixed electrode (51) is provided on the surface (2a) of the first movable portion (2), and a second movable electrode facing the second fixed electrode (52) is provided on the surface (4a) of the second movable portion (4). Since the first movable portion (2) and the second movable portion (4) move in opposite directions, the state of movement of the first movable portion (2) can be detected by obtaining the difference between a change in capacitance between the first fixed electrode (51) and the first movable electrode and a change in capacitance between the second fixed electrode (52) and the second movable electrode.

Inventors:

YAZAWA HISAYUKI (JP)
SATO KIYOSHI (JP)
TAKAHASHI TORU (JP)
OHKAWA HISANOBU (JP)

Application Number:

PCT/JP2009/062082

Publication Date:

January 07, 2010

Filing Date:

July 02, 2009

Export Citation:

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Assignee:

ALPS ELECTRIC CO LTD (JP)
YAZAWA HISAYUKI (JP)
SATO KIYOSHI (JP)
TAKAHASHI TORU (JP)
OHKAWA HISANOBU (JP)

International Classes:

G01P15/125; H01L29/84

Domestic Patent References:

WO2003044539A1

2003-05-30

Foreign References:

JP2008139282A	2008-06-19
US20050092107A1	2005-05-05
JP2003014778A	2003-01-15
JP2006266873A	2006-10-05
JP2007298385A	2007-11-15

Other References: