Title:
CAPACITANCE DETECTION TYPE SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/016094
Kind Code:
A1
Abstract:
A capacitance detection type sensor in which the size of a gap and parallelism between a movable detection electrode portion of a movable weight portion and a fixed detection electrode portion facing the movable detection electrode portion can be precisely formed. The capacitance detection type sensor comprises a conductive movable weight portion (10) which is physically displaced by applied external force, a substrate (2) which supports the movable weight portion (10), a movable detection electrode portion (31) which is provided integrally with the movable weight portion (10) and detects a change in capacitance based on the displacement, a fixed detection electrode portion (32) which faces the movable detection electrode portion (31) and is disposed on the side opposite to the substrate (2) across the movable detection electrode portion (31), and an electrode support portion (11) which is provided in a protruding manner on the substrate (2) and supports the fixed detection electrode portion (32).
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Inventors:
YOKOUCHI TOSHIO (JP)
SAKAMURA MOTOKI (JP)
ARITA YOKO (JP)
HANIHARA KOUJI (JP)
SAKAMURA MOTOKI (JP)
ARITA YOKO (JP)
HANIHARA KOUJI (JP)
Application Number:
PCT/JP2008/002128
Publication Date:
February 11, 2010
Filing Date:
August 06, 2008
Export Citation:
Assignee:
PIONEER CORP (JP)
PIONEER MICRO TECHNOLOGY CORP (JP)
YOKOUCHI TOSHIO (JP)
SAKAMURA MOTOKI (JP)
ARITA YOKO (JP)
HANIHARA KOUJI (JP)
PIONEER MICRO TECHNOLOGY CORP (JP)
YOKOUCHI TOSHIO (JP)
SAKAMURA MOTOKI (JP)
ARITA YOKO (JP)
HANIHARA KOUJI (JP)
International Classes:
G01C19/56; G01P15/125
Foreign References:
US5583291A | 1996-12-10 | |||
JPH05218300A | 1993-08-27 | |||
JPH05249138A | 1993-09-28 | |||
JP2002022446A | 2002-01-23 | |||
JPH08136577A | 1996-05-31 | |||
US5955668A | 1999-09-21 | |||
JPH1062177A | 1998-03-06 | |||
JPH1048247A | 1998-02-20 |
Attorney, Agent or Firm:
OCHIAI, MINORU (JP)
Minoru Ochiai (JP)
Minoru Ochiai (JP)
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