Title:
CAPACITANCE DIAPHRAGM GAUGE, VACUUM DEVICE, AND METHOD FOR MANUFACTURE OF DEVICE
Document Type and Number:
WIPO Patent Application WO2010125601
Kind Code:
A1
Abstract:
Disclosed is a capacitance diaphragm gauge which comprises: a vacuum sealing chamber of which a part is a membrane electrode; two or more electrodes fixed in the vacuum sealing chamber and arranged so as to face the membrane electrode in the vacuum sealing chamber; and a signal output unit for outputting a signal for measuring a pressure based on the capacitance between the membrane electrode and each of the two or more electrodes.
Inventors:
MIYASHITA HARUZO (JP)
Application Number:
PCT/JP2009/001916
Publication Date:
November 04, 2010
Filing Date:
April 27, 2009
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
MIYASHITA HARUZO (JP)
MIYASHITA HARUZO (JP)
International Classes:
G01L9/12; G01L9/00; G01L21/00
Foreign References:
| JP2007303922A | 2007-11-22 | |||
| JP2002318166A | 2002-10-31 | |||
| JPH07239281A | 1995-09-12 | |||
| JP2005331328A | 2005-12-02 |
Attorney, Agent or Firm:
OHTSUKA, YASUNORI (JP)
Yasunari Otsuka (JP)
Yasunari Otsuka (JP)
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