Title:
CAPACITANCE MEASUREMENT METHOD, SYSTEM AND APPARATUS, AND ELECTRONIC DEVICE AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2023/178756
Kind Code:
A1
Abstract:
A capacitance measurement method, system and apparatus, and an electronic device and a storage medium. The method is applied to a machine table. The method comprises: obtaining a calibration file, wherein the calibration file comprises corresponding first capacitance values when a measurement pin card is floated (S11); simultaneously measuring several semiconductor devices by using the measurement pin card, so as to obtain second capacitance values corresponding to the several semiconductor devices, wherein the several semiconductor devices are located in the same test module of a semiconductor chip (S12); and determining target capacitance values of the several semiconductor devices on the basis of the several first capacitance values and the several second capacitance values (S13).
Inventors:
YANG BO (CN)
XU QIAN (CN)
HUANG XINYU (CN)
XU QIAN (CN)
HUANG XINYU (CN)
Application Number:
PCT/CN2022/086800
Publication Date:
September 28, 2023
Filing Date:
April 14, 2022
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01L21/66; G01R35/00
Foreign References:
| CN112731241A | 2021-04-30 | |||
| CN106098582A | 2016-11-09 | |||
| CN114188238A | 2022-03-15 | |||
| CN208399596U | 2019-01-18 | |||
| CN111933546A | 2020-11-13 | |||
| US20160373142A1 | 2016-12-22 |
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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