Title:
CAPACITANCE-TYPE ACCELERATION SENSOR AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2004/019049
Kind Code:
A1
Abstract:
A weight (50) is formed in a mushroom shape where a shaft portion (52) that is passed through a center hole (31) of an upper side electrode substrate (30) and fixed to a diaphragm (10) and a head portion (51) that is provided on the outer face side of the upper electrode substrate (30) and has a larger diameter than the center hole (31) are integrated. A diaphragm (10) is sandwiched by spacers (20), and the upper electrode substrate (30) and a lower electrode substrate (40) are individually laid on each spacer (20). After that, the shaft portion (52) of the weight (50) is passed through the center hole (31) of the upper electrode substrate (30) and is welded to the diaphragm (10). With detection sensitivity of a capacitance-type acceleration sensor ensured, the sensor is reduced in weight and downsized effectively.
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Inventors:
SUZUKI KAZUSHI (JP)
FUJINAMI NAOHIRO (JP)
FUKADA NAOTAKA (JP)
FUJINAMI NAOHIRO (JP)
FUKADA NAOTAKA (JP)
Application Number:
PCT/JP2003/008507
Publication Date:
March 04, 2004
Filing Date:
July 03, 2003
Export Citation:
Assignee:
STAR MFG CO (JP)
SUZUKI KAZUSHI (JP)
FUJINAMI NAOHIRO (JP)
FUKADA NAOTAKA (JP)
SUZUKI KAZUSHI (JP)
FUJINAMI NAOHIRO (JP)
FUKADA NAOTAKA (JP)
International Classes:
G01P15/125; (IPC1-7): G01P15/125
Foreign References:
| JPH11133055A | 1999-05-21 | |||
| JPH11248736A | 1999-09-17 | |||
| US6378381B1 | 2002-04-30 |
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