Title:
CAPACITANCE-TYPE SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2017/222313
Kind Code:
A1
Abstract:
The present invention relates to a capacitance-type sensor and a manufacturing method therefor. A capacitance-type sensor (10) according to one embodiment of the present invention comprises: a substrate (100); a carbon electrode film (200) formed on the substrate (100) and including a carbon material; an insulating film (300) formed on the carbon electrode film (200); at least one electrode (400) formed on at least a part of the insulating film (300); and a sensing film (500) covering at least a part of the electrode (400) and formed on the insulating film (300).
Inventors:
CHANG JOON YEON (KR)
CHOI YONG SIK (KR)
NA DAE SEOK (KR)
CHOI YONG SIK (KR)
NA DAE SEOK (KR)
Application Number:
PCT/KR2017/006556
Publication Date:
December 28, 2017
Filing Date:
June 22, 2017
Export Citation:
Assignee:
KOREA INST SCI & TECH (KR)
International Classes:
G01R15/16; G01D5/24; G01R27/26; G01R31/02; G01R31/12; H01F27/12
Foreign References:
| KR101359735B1 | 2014-02-11 | |||
| KR20160027873A | 2016-03-10 | |||
| JP5120453B2 | 2013-01-16 | |||
| US20090091337A1 | 2009-04-09 | |||
| CN104697661A | 2015-06-10 |
Attorney, Agent or Firm:
KIM, Han et al. (KR)
Download PDF: