Title:
CAPACITIVE ELEMENT AND PLASMA PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/146758
Kind Code:
A1
Abstract:
A capacitive element using a liquid as a dielectric, whereby the capacitance is prevented from changing. The capacitive element is equipped with: a storage container that has an introduction port for introducing a liquid serving as a dielectric, has an discharge port for discharging the liquid, and is filled with the liquid; and at least one pair of electrodes that are provided in the storage container and face each other, wherein an opening section for exhausting air bubbles in the storage container is formed in an upper wall of the storage container.
Inventors:
LI DONGWEI (JP)
ANDO YASUNORI (JP)
ANDO YASUNORI (JP)
Application Number:
PCT/JP2019/002497
Publication Date:
August 01, 2019
Filing Date:
January 25, 2019
Export Citation:
Assignee:
NISSIN ELECTRIC CO LTD (JP)
International Classes:
H01G5/06; H01G5/013; H01G5/08; H05H1/46
Foreign References:
| JPH0232515A | 1990-02-02 | |||
| JPS51137639U | 1976-11-06 | |||
| JP2013134836A | 2013-07-08 | |||
| JP2013152788A | 2013-08-08 | |||
| JP2017063000A | 2017-03-30 |
Download PDF: