Title:
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER HAVING ADJUSTABLE BENDING ANGLE, AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2023/068444
Kind Code:
A1
Abstract:
Disclosed are a capacitive micromachined ultrasonic transducer having an adjustable bending angle and a method for manufacturing same. The ultrasonic transducer according to one embodiment may comprise: a substrate; a plurality of transducer elements spaced apart from each other and stacked on top of the substrate; flexible hinges which are positioned between the plurality of transducer elements and formed so as to pass through the substrate; a first polymer layer formed so as to cover the bottom of the substrate; and an actuator layer formed under the first polymer layer.
More Like This:
| WO/2021/038300 | CMUT TRANSDUCER |
Inventors:
LEE HYUN JOO (KR)
LEE SANG MOK (KR)
YUN GICHAN (KR)
LEE SANG MOK (KR)
YUN GICHAN (KR)
Application Number:
PCT/KR2021/018069
Publication Date:
April 27, 2023
Filing Date:
December 02, 2021
Export Citation:
Assignee:
KOREA ADVANCED INST SCI & TECH (KR)
International Classes:
B06B1/02; A61B8/00; A61N7/02; H01B3/42; H01B13/00
Foreign References:
| JP2020057860A | 2020-04-09 | |||
| KR20210034335A | 2021-03-30 | |||
| KR20150055820A | 2015-05-22 | |||
| KR20200121984A | 2020-10-27 | |||
| US20180214126A1 | 2018-08-02 |
Attorney, Agent or Firm:
MUHANN PATENT & LAW FIRM (KR)
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