Title:
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND INTRACORPOREAL ULTRASOUND DIAGNOSTIC SYSTEM USING SAME
Document Type and Number:
WIPO Patent Application WO/2006/046471
Kind Code:
A1
Abstract:
Disclosed is a capacitive micromachined ultrasonic transducer which is composed of transducer elements respectively comprising a transducer cell which is composed of a silicon substrate, a first electrode arranged on the upper surface of the silicon substrate, a second electrode arranged opposite to the first electrode at a certain distance and a membrane supporting the second electrode. This capacitive micromachined ultrasonic transducer is characterized in that a groove portion is formed between two adjacent transducer elements and the groove portion is provide with a conductive film.
Inventors:
ADACHI HIDEO (JP)
WAKABAYASHI KATSUHIRO (JP)
MIZUNUMA AKIKO (JP)
OSAWA ATSUSHI (JP)
KAIMAI TATSUO (JP)
KANEKO SHINJI (JP)
NEMOTO KIYOSHI (JP)
MURAKAMI MIYUKI (JP)
TAMIYA KOUSEI (JP)
KONDO YU (JP)
WAKABAYASHI KATSUHIRO (JP)
MIZUNUMA AKIKO (JP)
OSAWA ATSUSHI (JP)
KAIMAI TATSUO (JP)
KANEKO SHINJI (JP)
NEMOTO KIYOSHI (JP)
MURAKAMI MIYUKI (JP)
TAMIYA KOUSEI (JP)
KONDO YU (JP)
Application Number:
PCT/JP2005/019336
Publication Date:
May 04, 2006
Filing Date:
October 20, 2005
Export Citation:
Assignee:
OLYMPUS CORP (JP)
ADACHI HIDEO (JP)
WAKABAYASHI KATSUHIRO (JP)
MIZUNUMA AKIKO (JP)
OSAWA ATSUSHI (JP)
KAIMAI TATSUO (JP)
KANEKO SHINJI (JP)
NEMOTO KIYOSHI (JP)
MURAKAMI MIYUKI (JP)
TAMIYA KOUSEI (JP)
KONDO YU (JP)
ADACHI HIDEO (JP)
WAKABAYASHI KATSUHIRO (JP)
MIZUNUMA AKIKO (JP)
OSAWA ATSUSHI (JP)
KAIMAI TATSUO (JP)
KANEKO SHINJI (JP)
NEMOTO KIYOSHI (JP)
MURAKAMI MIYUKI (JP)
TAMIYA KOUSEI (JP)
KONDO YU (JP)
International Classes:
A61B8/00
Other References:
HUANG Y. ET AL: "Fabricating Capacitive Micromachined Ultrasonic Transducers With Wafer-Bonding Technology", J MICROELECTRONICAL SYST., vol. 12, no. 2, April 2003 (2003-04-01), pages 128 - 137, XP001191649
DEMIRCI U. ET AL: "Forward-Viewing CMUT Arrays for Medical Imaging", IEEE TRANS ULTRASON FERROELECTR FREQ CONTROL, vol. 51, no. 7, July 2004 (2004-07-01), pages 886 - 894, XP002994781
MILLS D.M. AND SMITH L.S.: "Real-time in-vivo imaging with capacitive micromachined ultrasound transducer (cMUT) linear arrays", PROC IEEE ULTRASON SYMP, vol. 1, no. 2, 2003, pages 568 - 571, XP010702813
See also references of EP 1810619A4
DEMIRCI U. ET AL: "Forward-Viewing CMUT Arrays for Medical Imaging", IEEE TRANS ULTRASON FERROELECTR FREQ CONTROL, vol. 51, no. 7, July 2004 (2004-07-01), pages 886 - 894, XP002994781
MILLS D.M. AND SMITH L.S.: "Real-time in-vivo imaging with capacitive micromachined ultrasound transducer (cMUT) linear arrays", PROC IEEE ULTRASON SYMP, vol. 1, no. 2, 2003, pages 568 - 571, XP010702813
See also references of EP 1810619A4
Attorney, Agent or Firm:
Osuga, Yoshiyuki (Nibancho Bldg. 8-20, Nibanch, Chiyoda-ku Tokyo 84, JP)
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