Title:
CAPACITIVE PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/192242
Kind Code:
A1
Abstract:
A capacitive physical quantity sensor is provided with a first substrate (14, 15), a movable electrode (24), a fixed electrode (31, 41), and a second substrate (11, 201). The portion of the second substrate opposing the movable electrode has an auxiliary electrode (71a, 72a) disposed thereon having an area of opposition to the movable electrode that changes by different amounts when the movable electrode moves in one direction in a prescribed direction and when the movable electrode moves in the opposite direction from the one direction, and the physical quantity is detected on the basis of a capacitance (Cd) corresponding to the distance between the movable electrode and the fixed electrode and a capacitance (Cs) corresponding to the opposing area between the movable electrode and the auxiliary electrode.
Inventors:
SUGIMOTO KIYOMASA (JP)
SAKAI MINEKAZU (JP)
SAKAI MINEKAZU (JP)
Application Number:
PCT/JP2014/002594
Publication Date:
December 04, 2014
Filing Date:
May 16, 2014
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01P15/125; H01L29/84
Foreign References:
| JP2012202696A | 2012-10-22 | |||
| JP2012194112A | 2012-10-11 | |||
| JP2012177563A | 2012-09-13 | |||
| JP2011169889A | 2011-09-01 |
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
Gold Junki (JP)
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