Title:
CAPACITIVE SENSOR
Document Type and Number:
WIPO Patent Application WO/2007/125961
Kind Code:
A1
Abstract:
Disclosed is a capacitive sensor (1) comprising a fixed electrode (6) and a movable
electrode (5) movably supported by an anchor portion (3) via a beam (4). In this
capacitive sensor (1), a sensing portion is constituted by arranging the fixed
electrode (6) and the movable electrode (5) opposite to each other in such a manner
that the electrodes are apart from each other, and the capacitive sensor (1) senses
a certain physical quantity by sensing a capacitance corresponding to the distance
between the electrodes. In this capacitive sensor (1), a stress relaxation
portion (30) for releasing stress is provided on at least one of an end (4a) of the
beam (4) to be connected to the anchor portion (3) and an end (4b) of the beam (4)
to be connected to the movable electrode (5).
Inventors:
FURUKUBO EIICHI
WAKABAYASHI DAISUKE
MIYAJIMA HISAKAZU
OHBUCHI MASAO
AOKI RYO
WAKABAYASHI DAISUKE
MIYAJIMA HISAKAZU
OHBUCHI MASAO
AOKI RYO
Application Number:
PCT/JP2007/058960
Publication Date:
November 08, 2007
Filing Date:
April 25, 2007
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD (JP)
FURUKUBO EIICHI
WAKABAYASHI DAISUKE
MIYAJIMA HISAKAZU
OHBUCHI MASAO
AOKI RYO
FURUKUBO EIICHI
WAKABAYASHI DAISUKE
MIYAJIMA HISAKAZU
OHBUCHI MASAO
AOKI RYO
International Classes:
G01P15/125
Foreign References:
| US5220835A | 1993-06-22 | |||
| JPS5810661A | 1983-01-21 | |||
| JP2003014778A | 2003-01-15 | |||
| JPH09512904A | 1997-12-22 | |||
| JPH09189716A | 1997-07-22 | |||
| JPH08178952A | 1996-07-12 | |||
| JP2000028634A | 2000-01-28 | |||
| US4736629A | 1988-04-12 | |||
| US6000287A | 1999-12-14 |
Other References:
See also references of EP 2023152A4
Attorney, Agent or Firm:
MIYOSHI, Hidekazu et al. (2-8 Toranomon 1-chom, Minato-ku Tokyo 01, JP)
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