Title:
CAPACITIVE SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/241628
Kind Code:
A1
Abstract:
According to the present invention, a first detection electrode (21) is provided on an insulating layer (10). A second detection electrode (22) is provided on the insulating layer (10) at a distance from the first detection electrode (21), while forming an electrostatic capacitance together with the first detection electrode (21). A protective layer (50) covers the first detection electrode (21) and the second detection electrode (22), while having a thickness d that satisfies 1 μm ≤ d ≤ 10 μm. The protective layer (50) is formed of zirconia or alumina.
Inventors:
MORISHITA AKIFUMI (JP)
Application Number:
PCT/JP2021/019964
Publication Date:
December 02, 2021
Filing Date:
May 26, 2021
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G01F23/26; G01N27/22
Foreign References:
| JPS62184342A | 1987-08-12 | |||
| JPS62182642A | 1987-08-11 | |||
| JP2007183245A | 2007-07-19 | |||
| JP2006337173A | 2006-12-14 | |||
| US20100307238A1 | 2010-12-09 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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