CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR - OMRON TATEISI ELECTRONICS CO

Title:

CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR

Document Type and Number:

WIPO Patent Application WO/2017/154412

Kind Code:

A1

Abstract:

Provided is a technology with which damage to a vibrating electrode film can be prevented by suppressing excessive deformation of the vibrating electrode film regardless of the direction in which the vibrating electrode film undergoes deformation when an acoustic sensor is subjected to excessive pressure. The invention is provided with a backplate 37, which is provided so as to face an opening of a substrate, and a vibrating electrode film 35, which is provided so as to face the backplate with a gap therebetween, and is further provided with a pressure release hole 35b, which is a through-hole that is provided in the vibrating electrode film 35, a protruding portion 37b, which is provided integrally to the backplate 37 using the same member as the backplate 37 and intrudes into the pressure release hole 35b in a state before deformation of the vibrating electrode film 35, and a pressure release flow path, which is an air flow path formed by a gap between the pressure release hole 35b and the protruding portion 37b, wherein the protruding portion 37b has a protruding portion hole 37c that connects the tip side of the protruding portion 37b and the opposite side of the backplate 37 from the protruding portion 37b.

Inventors:

KASAI TAKASHI (JP)
NAKAGAWA YUSUKE (JP)

Application Number:

PCT/JP2017/003299

Publication Date:

September 14, 2017

Filing Date:

January 31, 2017

Export Citation:

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Assignee:

OMRON TATEISI ELECTRONICS CO (JP)

International Classes:

H04R19/04; B81B3/00; H01L29/84

Foreign References:

JP2015056833A	2015-03-23
JP2015056832A	2015-03-23
JP2008259061A	2008-10-23
US20140353780A1	2014-12-04

Other References: