CAPACITOR AND METHOD FOR PRODUCING SAME

Title:

CAPACITOR AND METHOD FOR PRODUCING SAME

Document Type and Number:

WIPO Patent Application WO/2019/171470

Kind Code:

A1

Abstract:

In order to provide a capacitor which can achieve a large electric capacity, a capacitor (1A) according to one embodiment of this invention comprises: a substrate (10) having a first surface and a second surface, and provided with one or more through holes (TH1) each extending from the first surface to the second surface; a first electroconductive layer (20a) which covers the first surface, the second surface and the sidewalls of the one or more through holes (TH1); a second electroconductive layer (20b) which, with the first electroconductive layer (20a) sandwiched between, faces the first surface, the second surface and the sidewalls of the one or more through holes (TH1); and a dielectric layer (50) interposed between the first electroconductive layer (20a) and the second electroconductive layer (20b).

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Inventors:

HIGUCHI KAZUHITO (JP)
OBATA SUSUMU (JP)
MATSUO KEIICHIRO (JP)
SANO MITSUO (JP)

Application Number:

PCT/JP2018/008585

Publication Date:

September 12, 2019

Filing Date:

March 06, 2018

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Assignee:

TOSHIBA KK (JP)

International Classes:

H01L21/822; H01G4/33; H01L27/04

Foreign References:

JP2012089743A	2012-05-10
US20020134581A1	2002-09-26
JP2017050378A	2017-03-09
JP2009291991A	2009-12-17

Attorney, Agent or Firm:

KURATA, Masatoshi et al. (JP)

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