Title:
CAPACITOR AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2020/184517
Kind Code:
A1
Abstract:
A capacitor 100 includes a silicon substrate 1, a conductor layer 2, and a dielectric layer 3. The silicon substrate 1 includes: a major surface 10 that has a capacity exhibiting region 11 and a non-capacity exhibiting region 12; and a porous portion 13 provided in the capacity exhibiting region 11 in the thickness direction. The conductor layer 2 includes a surface layer portion 21 that covers at least a portion of a surface 110 of the capacity exhibiting region 11, and a filling portion 22 that fills at least a portion of pores 130 of the porous portion 13. The dielectric layer 3 is interposed between inner surfaces of the pores 130 and the filling portion 22.
Inventors:
YOSHIDA KAZUSHI
HAGIHARA YOSUKE
TAURA TAKUMI
HAGIHARA YOSUKE
TAURA TAKUMI
Application Number:
PCT/JP2020/010054
Publication Date:
September 17, 2020
Filing Date:
March 09, 2020
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01L27/04; H01G4/33
Foreign References:
| JP2001523050A | 2001-11-20 | |||
| JP2017098499A | 2017-06-01 | |||
| JP2009059990A | 2009-03-19 | |||
| JPH0613547A | 1994-01-21 | |||
| JPH05160342A | 1993-06-25 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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