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Patent Searching and Data


Title:
CAPACITOR
Document Type and Number:
WIPO Patent Application WO/2020/162459
Kind Code:
A1
Abstract:
The present invention provides a capacitor including: a base material including a pore structure part; a metal layer provided on one main surface of the base material; an extended layer provided on the metal layer; a lower electrode layer provided on surfaces of pores in the pore structure part; a dielectric layer provided on the lower electrode layer; and an upper electrode layer provided on the dielectric layer, where at least some of the pores penetrate the base material, the metal layer has a sealing part that seals one opening of a pore that penetrates, and the sealing part is conductive, and the lower electrode layer is electrically connected to the extended layer through the sealing part of the metal layer.

Inventors:
TAKAO MASAKAZU (JP)
MURASE YASUHIRO (JP)
MADASSAMY SANDRINE (FR)
VOIRON FREDERIC (FR)
LEFEVRE AUDE (FR)
Application Number:
PCT/JP2020/004147
Publication Date:
August 13, 2020
Filing Date:
February 04, 2020
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
COMMISSARIAT ENERGIE ATOMIQUE (FR)
International Classes:
H01G4/012; H01G9/04; H01G11/26; H01L49/02
Foreign References:
US20160268144A12016-09-15
CN105761943B2018-07-10
US8912522B22014-12-16
Other References:
HOURDAKIS E ET AL: "High-Density MIM Capacitors With Porous Anodic Alumina Dielectric", IEEE TRANSACTIONS ON ELECTRON DEVICES, IEEE SERVICE CENTER, PISACATAWAY, NJ, US, vol. 30, no. 10, 1 October 2010 (2010-10-01), pages 2679 - 2683, XP011316023, ISSN: 0018-9383
CHI-TSUNG HONG ET AL: "Nanotexture Electrode on Nanoporous AAO Dielectric for Micro Tactile Sensing Devices", MICRO ELECTRO MECHANICAL SYSTEMS, 2009. MEMS 2009. IEEE 22ND INTERNATIONAL CONFERENCE ON, IEEE, PISCATAWAY, NJ, USA, 25 January 2009 (2009-01-25), pages 100 - 103, XP031444240, ISBN: 978-1-4244-2977-6
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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