CAPACITY DETECTION TYPE SENSOR ELEMENT

Title:

CAPACITY DETECTION TYPE SENSOR ELEMENT

Document Type and Number:

WIPO Patent Application WO/2005/079112

Kind Code:

A1

Abstract:

A capacity detection type sensor element (10) includes a rectangular diaphragm (11) and a flat rear electrode (12) which are arranged to oppose each other. The capacity detection type sensor element (10) further includes fixed portions (14) each arranged to be adjacent to a side of the diaphragm (11) and having a side of a predetermined length at the side adjacent to the diaphragm (11). The rear electrode (12) is supported by the fixed portions (14) so as to form a space (13) between the rear electrode (12) and the diaphragm (11). The rear electrode (12) is an octagon as a whole having straight lines between adjacent fixed portions not supported by the fixed portions (14).

Inventors:

KAGAWA KENICHI (JP)
YAKABE MASAMI (JP)
SAEKI SHINICHI (JP)
OHTSUJI TAKAHISA (JP)

Application Number:

PCT/JP2005/002172

Publication Date:

August 25, 2005

Filing Date:

February 14, 2005

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
HOSIDEN CORP (JP)
KAGAWA KENICHI (JP)
YAKABE MASAMI (JP)
SAEKI SHINICHI (JP)
OHTSUJI TAKAHISA (JP)

International Classes:

G01L9/12; G01L9/00; H04R19/00; H04R19/04; (IPC1-7): H04R19/04; G01L9/00

Foreign References:

JP2001231099A	2001-08-24
JPS56147699U	1981-11-06
JP2003209899A	2003-07-25
JP2002027595A	2002-01-25
JP2004096543A	2004-03-25
JP2002315097A	2002-10-25

Other References: