Title:
CARBON BRIDGED AMINOSILANE COMPOUNDS FOR HIGH GROWTH RATE SILICON-CONTAINING FILMS
Document Type and Number:
WIPO Patent Application WO/2018/071832
Kind Code:
A8
Abstract:
Described herein are compositions and methods for forming silicon oxide films. In one aspect, the film is deposited from at least one precursor, wherein the at least one precursor has a structure represented by Formula A: wherein R, R1, R2, R3, R4, and R5 are defined herein.
Inventors:
WANG MEILIANG (US)
LEI XINJIAN (US)
XIAO MANCHAO (US)
RAJARAMAN SURESH (US)
LEI XINJIAN (US)
XIAO MANCHAO (US)
RAJARAMAN SURESH (US)
Application Number:
PCT/US2017/056615
Publication Date:
August 30, 2018
Filing Date:
October 13, 2017
Export Citation:
Assignee:
VERSUM MAT US LLC (US)
International Classes:
C23C16/40; C07F7/10; C23C16/455
Attorney, Agent or Firm:
ROSSI, Joseph, D. et al. (US)
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