Title:
CARBON NANOTUBE AGGREGATE AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2006/120780
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a carbon nanotube of novel structure. [MEANS FOR SOLVING PROBLEMS] A buffer layer composed of TiN is formed on an Si substrate. Co nano particles having a particle size of 5 nm or less are deposited on the buffer layer by generating a pulse arc about 3-150 times by using a pulse arc plasma under a vacuum of 1×10-5 Torr. When a carbon nanotube is grown subsequently, a pyramidal punctate aggregate of carbon nanotubes having a mean outside diameter of 4 nm and a mean inside diameter of 3 nm is formed. The aggregate exhibits high field electron emission efficiency.
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Inventors:
HORI MASARU (JP)
HIRAMATSU MINEO (JP)
KANO HIROYUKI (JP)
HIRAMATSU MINEO (JP)
KANO HIROYUKI (JP)
Application Number:
PCT/JP2006/300981
Publication Date:
November 16, 2006
Filing Date:
January 23, 2006
Export Citation:
Assignee:
NU ECO ENGINEERING CO LTD (JP)
HORI MASARU (JP)
HIRAMATSU MINEO (JP)
KANO HIROYUKI (JP)
HORI MASARU (JP)
HIRAMATSU MINEO (JP)
KANO HIROYUKI (JP)
International Classes:
C01B31/02; B82B1/00; B82B3/00; H01J1/304; H01J9/02
Other References:
HIRAMATSU M.: "Fabrication of Dense Carbon Nanotube Films Using Microwave Plasma-Enhanced Chemical Vapor Deposition", JAPANESE JOURNAL OF APPLIED PHYSICS, 15 February 2005 (2005-02-15), pages 1150 - 1154, XP002997549
NAGAO H.: "Fabrication of Dense Carbon Nanotube Film Using Microwave Plasma-Enhanced CVD", vol. P2-075, 26 January 2005 (2005-01-26), pages 367 - 368, XP002997550
SHIMIZU Y.: "Fabrication of carbon nanotube assemblies on Ni-Mo substrates mimics law of natural forest growth", CHEMICAL PHYSICS LETTERS, vol. 370, 2003, pages 774 - 780, XP002997551
TAN C.K.: "Plasma synthesis of well-aligned carbon nanocones", DIAMOND AND RELATED MATERIALS, vol. 14, 19 January 2005 (2005-01-19), pages 902 - 906, XP004857188
NAGAO H.: "Fabrication of Dense Carbon Nanotube Film Using Microwave Plasma-Enhanced CVD", vol. P2-075, 26 January 2005 (2005-01-26), pages 367 - 368, XP002997550
SHIMIZU Y.: "Fabrication of carbon nanotube assemblies on Ni-Mo substrates mimics law of natural forest growth", CHEMICAL PHYSICS LETTERS, vol. 370, 2003, pages 774 - 780, XP002997551
TAN C.K.: "Plasma synthesis of well-aligned carbon nanocones", DIAMOND AND RELATED MATERIALS, vol. 14, 19 January 2005 (2005-01-19), pages 902 - 906, XP004857188
Attorney, Agent or Firm:
Fujitani, Osamu (18-25 Marunouchi 2-chome, Naka-ku, Nagoya-sh, Aichi 02, JP)
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