Title:
CARBON NANOTUBE DEVICES WITH UNZIPPED LOW-RESISTANCE CONTACTS
Document Type and Number:
WIPO Patent Application WO/2014/070267
Kind Code:
A3
Abstract:
A method of creating a semiconductor device is disclosed. An end of a carbon nanotube is unzipped to provide a substantially flat surface. A contact of the semiconductor device is formed. The substantially flat surface of the carbon nanotube is coupled to the contact to create the semiconductor device. An energy gap in the unzipped end of the carbon nanotube may be less than an energy gap in a region of the carbon nanotube outside of the unzipped end region.
Inventors:
FARMER DAMON B (US)
FRANKLIN AARON D (US)
SMITH JOSHUA T (US)
TULEVSKI GEORGE S (US)
FRANKLIN AARON D (US)
SMITH JOSHUA T (US)
TULEVSKI GEORGE S (US)
Application Number:
PCT/US2013/052162
Publication Date:
September 03, 2015
Filing Date:
July 26, 2013
Export Citation:
Assignee:
IBM (US)
International Classes:
H01L21/336; H01L29/76; H01L29/15
Foreign References:
| US20120175594A1 | 2012-07-12 | |||
| US20110309334A1 | 2011-12-22 |
Other References:
MARGINE, E ET AL.: "Theory of genus reduction in alkali-induced graphitization of nanoporous carbon.", PHYSICAL REVIEW B, vol. 76, no. 11, 2007, pages 115436 - 1 - 115436-5, XP055221281, Retrieved from the Internet [retrieved on 20131126]
Attorney, Agent or Firm:
SULLIVAN, Sean F. (20 Church St. 22nd Floo, Hartford Connecticut, US)
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