Title:
CARRIER MEASUREMENT DEVICE, CARRIER MEASUREMENT METHOD, AND CARRIER MANAGEMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2022/080159
Kind Code:
A1
Abstract:
A carrier measurement device (1) comprises a rotating table (23), a table drive motor (24), an upper thickness sensor (41), a lower thickness sensor (42), and a sliding part (13). The rotating table (23) includes a carrier storage part (23A) for horizontally storing a carrier (21) which is formed with an eccentric hole (21A) for holding a semiconductor wafer. The table drive motor (24) rotates the rotating table (23) about a central axis thereof as the axis of rotation. The upper thickness sensor (41) and the lower thickness sensor (42) are disposed above and under the carrier (21), and measure the thickness of the carrier (21) in a non-contact manner. The sliding part (13) slides the rotating table (23) in a horizontal direction. The carrier storage part (23A) is formed to be capable of storing the carrier (21) such that the center of the hole (21A) and the center of the rotating table (23) align with each other.
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Inventors:
TAKAI HIROSHI (JP)
KUROIWA TAKESHI (JP)
KIDO RYOSUKE (JP)
KUROIWA TAKESHI (JP)
KIDO RYOSUKE (JP)
Application Number:
PCT/JP2021/036539
Publication Date:
April 21, 2022
Filing Date:
October 04, 2021
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
B24B37/28; B24B41/06; B24B49/12; H01L21/304
Foreign References:
| JP2019509465A | 2019-04-04 | |||
| JP2015174168A | 2015-10-05 | |||
| JP2012145439A | 2012-08-02 | |||
| JP2020049612A | 2020-04-02 | |||
| JP2019186490A | 2019-10-24 | |||
| JP2017159382A | 2017-09-14 | |||
| US6544103B1 | 2003-04-08 |
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
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