Title:
CARRIER SUPPORT DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/001246
Kind Code:
A1
Abstract:
A carrier support device (10) supporting a carrier (C) horizontally storing a plurality of roughly flat plate-shaped treated bodies (D) at intervals in the vertical direction. The carrier comprises multiple sets of support stages (lower surfaces of grooves (1A)) formed at intervals in the vertical direction, and is formed so that the set of each support stage supports the bottom face edge part of one treated body (D). The carrier support device comprises a loading table (11) for loading the carrier (C) thereon, a raising member (12) installed liftably relative to the loading table, and a drive mechanism drivingly lifting the raising member. The raising member (12) pushes up, in rising, the bottom face of the treated body (D) supported by the set of the lowermost support stage of the carrier (C) to raise the treated body from the support stage.
Inventors:
OGASAWARA IKUO (JP)
KATO YOSHIYASU (JP)
KATO YOSHIYASU (JP)
Application Number:
PCT/JP2005/011255
Publication Date:
January 05, 2006
Filing Date:
June 20, 2005
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
OGASAWARA IKUO (JP)
KATO YOSHIYASU (JP)
OGASAWARA IKUO (JP)
KATO YOSHIYASU (JP)
International Classes:
H01L21/68; (IPC1-7): H01L21/68
Foreign References:
| JP2002261145A | 2002-09-13 | |||
| JP2001284838A | 2001-10-12 | |||
| JPH11233998A | 1999-08-27 | |||
| JP2003309165A | 2003-10-31 |
Attorney, Agent or Firm:
Yoshitake, Kenji (Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, JP)
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