Title:
CARRYING DEVICE AND SEMICONDUCTOR REACTION CHAMBER
Document Type and Number:
WIPO Patent Application WO/2022/095794
Kind Code:
A1
Abstract:
Disclosed in the present invention are a carrying device and a semiconductor reaction chamber. In the carrying device, a focusing ring assembly comprises: an upper focusing ring and a lower focusing ring; a groove is formed on the upper surface of the lower focusing ring, and the upper focusing ring is arranged in the groove in a height-adjustable manner; the area on the upper surface of the lower focusing ring and at the inner side of the groove is a supporting area, and the supporting area is flush with the upper surface of a chuck for supporting a wafer together; the upper surface of the upper focusing ring is higher than the supporting area when the upper focusing ring is located in the groove; the lower surface of the upper focusing ring is provided with a first limiting portion, and the first limiting portion is disposed corresponding to the groove; the upper end of each focusing ring ejector pin is provided with a second limiting portion, and the second limiting portion can work in conjunction with the first limiting portion when the focusing ring ejector pins support the upper focusing ring, so as to define the horizontal position of the upper focusing ring on the focusing ring ejector pins. The solution can solve the problems of the influence of a focusing ring on clamping and position accuracy of a wafer, and poor safety performance of a semiconductor reaction chamber.
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Inventors:
XU JINJI (CN)
MAO XINGFEI (CN)
MAO XINGFEI (CN)
Application Number:
PCT/CN2021/127291
Publication Date:
May 12, 2022
Filing Date:
October 29, 2021
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01J37/21; H01J37/20; H01J37/305; H01J37/32; H01L21/3065; H01L21/67; H01L21/683
Foreign References:
| CN112397366A | 2021-02-23 | |||
| US20200098550A1 | 2020-03-26 | |||
| CN108630514A | 2018-10-09 | |||
| US20040149389A1 | 2004-08-05 | |||
| US20180294137A1 | 2018-10-11 | |||
| CN1540738A | 2004-10-27 | |||
| CN107093569A | 2017-08-25 | |||
| CN111508805A | 2020-08-07 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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