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Title:
CASSETTE APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2013/153706
Kind Code:
A1
Abstract:
This cassette apparatus has a first unit section that performs substrate supply or substrate recovery, and a second unit section that performs the substrate supply or the substrate recovery, which is not performed by the first unit section. The first unit section and the second unit section can be brought close to each other or separated from each other.

Inventors:
HAMADA TOMOHIDE (JP)
SUZUKI TOMONARI (JP)
Application Number:
PCT/JP2012/082695
Publication Date:
October 17, 2013
Filing Date:
December 17, 2012
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
B65H23/04; H01L21/677
Domestic Patent References:
WO2011158584A12011-12-22
WO2006100868A12006-09-28
Foreign References:
JP2012073582A2012-04-12
JPH0910446A1997-01-14
JP2011221538A2011-11-04
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
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