Title:
CASSETTE AND CLEANING BATH SET
Document Type and Number:
WIPO Patent Application WO/2020/026771
Kind Code:
A1
Abstract:
A cassette (51) immersed in a treatment liquid in a cleaning bath (21) while retaining at least one semiconductor substrate (57) is configured from a tubular body (52), and is provided with: an outer peripheral surface (52a) exposed to the outside of the tubular body (52); and, on an inner peripheral surface of the tubular body (52), a retaining portion (retaining projections (52e), substrate supporting portion (52f)) for retaining the at least one semiconductor substrate (57). In a cross section perpendicular to the direction of a tubular axis of the tubular body (52), a part, in a perimetrical direction, of the outer peripheral surface (52a) is a curve, and the remainder thereof is a straight line.
Inventors:
WATANABE SHINGO (JP)
KUCHIYAMA TAKASHI (JP)
KUCHIYAMA TAKASHI (JP)
Application Number:
PCT/JP2019/027760
Publication Date:
February 06, 2020
Filing Date:
July 12, 2019
Export Citation:
Assignee:
KANEKA CORP (JP)
International Classes:
B08B3/12; H01L21/304; H01L21/306; H01L21/673
Domestic Patent References:
| WO2014038277A1 | 2014-03-13 |
Foreign References:
| JP2012104682A | 2012-05-31 | |||
| JPH03222419A | 1991-10-01 | |||
| JPS6332680U | 1988-03-02 | |||
| JPH05102119A | 1993-04-23 |
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
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