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Patent Searching and Data


Title:
CASSETTE DRYING APPARATUS, CASSETTE DRYING METHOD, APPARATUS FOR MANUFACTURING EL DEVICE, AND METHOD FOR MANUFACTURING EL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/016861
Kind Code:
A1
Abstract:
This cassette drying apparatus (1) is provided with: first to fourth blow nozzles (3a-3d) that jet hot air along first to fourth side surface sections (12a-12d) of a substrate cassette (2); and an air exhaust duct (4) disposed in the center of the bottom surface of the substrate cassette (2). The first to fourth blow nozzles (3a-3d) are disposed in orientations for jetting hot air (13a-13d) in a clockwise direction around the air exhaust duct (4).

Inventors:
KAWAGISHI, Shigeru
Application Number:
JP2017/025948
Publication Date:
January 24, 2019
Filing Date:
July 18, 2017
Export Citation:
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Assignee:
SHARP KABUSHIKI KAISHA (1 Takumi-cho, Sakai-ku Sakai Cit, Osaka 22, 〒5908522, JP)
International Classes:
F26B3/04; F26B9/00; F26B21/00; H01L21/304
Foreign References:
JP2011153732A2011-08-11
JP2001519521A2001-10-23
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (Daiwa Minamimorimachi Building, 2-6 Tenjinbashi 2-chome Kita, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
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