Title:
CASSETTE
Document Type and Number:
WIPO Patent Application WO/2010/090276
Kind Code:
A1
Abstract:
Provide is a cassette, the bottom face of which can easily be opened and closed. A cassette (100) houses substrates (40). The cassette (100) is equipped with: a cassette main body (10) within which substrates (40) are disposed; a cassette opening (12) that is formed on a side of the cassette main body (10) and through which the substrates (40) are introduced and withdrawn; a bottom face opening (14) formed on the bottom face of the cassette main body (10); a bottom plate (20) that seals the bottom face opening (14); and bottom plate supports (22) that support the bottom plate (20) and are provided on the inner walls of the cassette main body (10).
Inventors:
MATSUYAMA AKIO
ARIMITSU TASUKU
SHIMADA HIROYUKI
MINATO TAKAYUKI
ARIMITSU TASUKU
SHIMADA HIROYUKI
MINATO TAKAYUKI
Application Number:
PCT/JP2010/051672
Publication Date:
August 12, 2010
Filing Date:
February 05, 2010
Export Citation:
Assignee:
SHARP KK (JP)
YODOGAWA HU TECH CO LTD (JP)
MATSUYAMA AKIO
ARIMITSU TASUKU
SHIMADA HIROYUKI
MINATO TAKAYUKI
YODOGAWA HU TECH CO LTD (JP)
MATSUYAMA AKIO
ARIMITSU TASUKU
SHIMADA HIROYUKI
MINATO TAKAYUKI
International Classes:
H01L21/673; B65D85/48; B65D85/86; B65G49/06
Foreign References:
| JPH1191864A | 1999-04-06 | |||
| JPS6489336A | 1989-04-03 | |||
| JPH09115997A | 1997-05-02 |
Attorney, Agent or Firm:
TESHIMA MASARU (JP)
Masaru Tejima (JP)
Masaru Tejima (JP)
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