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Title:
CATADIOPTRIC SYSTEM AND EXPOSURE SYSTEM PROVIDED WITH THE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2002/103431
Kind Code:
A1
Abstract:
A catadioptric system comprising a first image forming optical system (G1) having a concave reflection mirror (CM2) and a plane reflection mirror (M1) and used to form the first intermediate image of a first plane (R) based on light from the first plane, a second image forming optical system (G2) having a concave reflection mirror (CM3) and a plane reflection mirror (M4) and used to form the second intermediate image of the first plane based on light via the first image forming optical system, and a third refractive type image forming optical system (G3) for forming the final image of the first plane on a second plane (W) based on light via the second image forming optical system.

Inventors:
TAKAHASHI TOMOWAKI (JP)
Application Number:
PCT/JP2002/005259
Publication Date:
December 27, 2002
Filing Date:
May 30, 2002
Export Citation:
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Assignee:
NIPPON KOGAKU KK (JP)
TAKAHASHI TOMOWAKI (JP)
International Classes:
G02B13/14; G02B13/18; G02B17/08; G03F7/20; H01L21/027; (IPC1-7): G02B17/08; H01L21/027
Foreign References:
JPH0821955A1996-01-23
JPH0772393A1995-03-17
JPH0713070A1995-01-17
JPH06242379A1994-09-02
JPH0862502A1996-03-08
JPH06349699A1994-12-22
JPH06265789A1994-09-22
Attorney, Agent or Firm:
Inoue, Yoshio (1-4 Nihonbashi 3-chom, Chuo-ku Tokyo, JP)
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