Title:
CATADIOPTRIC SYSTEM AND OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/066313
Kind Code:
A1
Abstract:
A catadioptric system (LS) is provided with: a first reflecting mirror (M1) that reflects light transmitted from an object; a second reflecting mirror (M2) that reflects light reflected by the first reflecting mirror (M1); a first lens group (G1), which passes light travelling toward the second reflecting mirror (M2) after being reflected by the first reflecting mirror (M1), and which also passes light reflected by the second reflecting mirror (M2); and a second lens group (G2) that passes light passed through the first lens group (G1) after being reflected by the second reflecting mirror (M2). The catadioptric system is configured such that an image of the object is formed by means of light passed through the second lens group (G2).
Inventors:
UCHIDA KENSUKE (JP)
Application Number:
PCT/JP2017/032660
Publication Date:
April 12, 2018
Filing Date:
September 11, 2017
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B17/08
Foreign References:
| JPS5376830A | 1978-07-07 | |||
| JP2013218022A | 2013-10-24 | |||
| JP2013015713A | 2013-01-24 | |||
| JPH03208005A | 1991-09-11 | |||
| US20140049841A1 | 2014-02-20 |
Attorney, Agent or Firm:
OHNISHI, Shogo et al. (JP)
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