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Title:
CATALYST-INDUCED GROWTH OF CARBON NANOTUBES ON TIPS OF CANTILEVERS AND NANOWIRES
Document Type and Number:
WIPO Patent Application WO2003027011
Kind Code:
A3
Abstract:
A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scanning probe microscopy (AFM, EFM, etc.). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate; (2) catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips; (3) control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions; and (4) automation for mass production.

Inventors:
LEE IDA
LEE JAMES WEIFU
LOWNDES DOUGLAS H
MERKULOV VLADIMIR I
ERES GYULA
WEI YAYI
GREENBAUM ELIAS
Application Number:
PCT/US2002/017237
Publication Date:
October 16, 2003
Filing Date:
June 03, 2002
Export Citation:
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Assignee:
UT BATTELLE LLC (US)
UNIV TENNESSEE RES FOUNDATION (US)
International Classes:
B82B1/00; C01B31/02; B82B3/00; C25D1/02; C25D5/18; C25D7/00; C25D21/12; G01Q70/16; (IPC1-7): C01B31/02; C23C16/26
Foreign References:
EP1129990A12001-09-05
Other References:
MERKULOV V I ET AL: "PATTERNED GROWTH OF INDIVIDUAL AND MULTIPLE VERTICALLY ALIGNED CARBON NANOFIBERS", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 76, no. 24, 12 June 2000 (2000-06-12), pages 3555 - 3557, XP000950455, ISSN: 0003-6951
TARNTAIR F G ET AL: "HIGH CURRENT DENSITY FIELD EMISSION FROM ARRAYS OF CARBON NANOTUBESAND DIAMOND-CLAD SI TIPS", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 18, no. 3, June 2000 (2000-06-01), pages 1207 - 1211, XP000955238, ISSN: 0734-211X
BOWER C ET AL: "NUCLEATION AND GROWTH OF CARBON NANOTUBES BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 77, no. 17, 23 October 2000 (2000-10-23), pages 2767 - 2769, XP000975047, ISSN: 0003-6951
REN Z F ET AL: "LARGE ARRAYS OF WELL-ALIGNED CARBON NANOTUBES", AIP CONFERENCE PROCEEDINGS, AMERICAN INSTITUTE OF PHYSICS, NEW YORK,NY, US, vol. 486, no. 486, 27 February 1999 (1999-02-27), pages 263 - 267, XP001146166, ISSN: 0094-243X
CHUNG S J ET AL: "Novel plasma chemical vapor deposition method of carbon nanotubes at low temperature for field emission display application", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 10, no. 2, February 2001 (2001-02-01), pages 248 - 253, XP004322366, ISSN: 0925-9635
CUI H ET AL: "ALIGNED CARBON NANOTUBES VIA MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION", MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, MATERIALS RESEARCH SOCIETY, PITTSBURG, PA, US, vol. 593, 29 November 1999 (1999-11-29), pages 39 - 44, XP000961478, ISSN: 0272-9172
YOUNG CHUL CHOI ET AL: "CONTROLLING THE DIAMETER, GROWTH RATE, AND DENSITY OF VERTICALLY ALIGNED CARBON NANOTUBES SYNTHESIZED BY MICROWAVE PLASMA-ENCHANCED CHEMICAL VAPOR DEPOSITION", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 76, no. 17, 24 April 2000 (2000-04-24), pages 2367 - 2369, XP000954258, ISSN: 0003-6951
CUI H ET AL: "DEPOSITION OF ALIGNED BAMBOO-LIKE CARBON NANOTUBES VIA MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 88, no. 10, 15 November 2000 (2000-11-15), pages 6072 - 6074, XP001011939, ISSN: 0021-8979
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