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Title:
CATALYST-INDUCED GROWTH OF CARBON NANOTUBES ON TIPS OF CANTILEVERS AND NANOWIRES
Document Type and Number:
WIPO Patent Application WO2003027011
Kind Code:
B1
Abstract:
A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scanning probe microscopy (AFM, EFM, etc.). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate; (2) catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips; (3) control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions; and (4) automation for mass production.

Inventors:
LEE IDA
LEE JAMES WEIFU
LOWNDES DOUGLAS H
MERKULOV VLADIMIR I
ERES GYULA
WEI YAYI
GREENBAUM ELIAS
Application Number:
PCT/US2002/017237
Publication Date:
December 18, 2003
Filing Date:
June 03, 2002
Export Citation:
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Assignee:
UT BATTELLE LLC (US)
UNIV TENNESSEE RES FOUNDATION (US)
International Classes:
B82B1/00; C01B31/02; B82B3/00; C25D1/02; C25D5/18; C25D7/00; C25D21/12; G01Q70/16; (IPC1-7): C01B31/02; C23C16/26
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