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Title:
CATHODE DRIVE UNIT, DEPOSITION SYSTEM, METHOD OF OPERATING A DEPOSITION SYSTEM AND METHOD OF MANUFACTURING A COATED SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2022/164447
Kind Code:
A1
Abstract:
A cathode drive unit (100) for a deposition system is described. The cathode drive unit (100) includes a motor (110) having a drive shaft. (111). Further, the cathode drive unit (100) includes a gearbox (120) connected to the drive shaft (111). The gearbox (120) has a first output shaft (121) for driving a first rotatable cathode (131) and a second output shaft (122) for driving a second rotatable cathode (132). Further, a deposition system, a method of operating a deposition system, and a method of manufacturing a coated substrate are described.

Inventors:
LIN SHIN-HUNG (TW)
YANG CHI-CHANG (TW)
TANG WEI-TING (TW)
Application Number:
PCT/US2021/015769
Publication Date:
August 04, 2022
Filing Date:
January 29, 2021
Export Citation:
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Assignee:
APPLIED MATERIALS INC (US)
International Classes:
H01J37/34; C23C14/34
Foreign References:
US20040108301A12004-06-10
US20160002770A12016-01-07
US20180047543A12018-02-15
JPH0637030A1994-02-10
KR20180061113A2018-06-07
Attorney, Agent or Firm:
PATTERSON, B. Todd et al. (US)
Download PDF:
Claims:
CLAIMS 1. A cathode drive unit (100) for a deposition system, comprising - a motor (110) having a drive shaft (111), and - a gearbox (120) connected to the drive shaft (111), the gearbox having a first output shaft (121) for driving a first rotatable cathode (131) and a second output shaft (122) for driving a second rotatable cathode (132). 2. The cathode drive unit (100) of claim 1, wherein the gearbox (120) has a first gear assembly (140) and a second gear assembly (150), the first gear assembly (140) interacts with the drive shaft (111) and the second gear assembly (150) interacts with the first output shaft (121) and with the second output shaft (122). 3. The cathode drive unit (100) of claim 1 or 2, the gearbox (120) being connected to the drive shaft (111) via a screw gear pairing (170). 4. The cathode drive unit (100) of claim 3, the screw gear pairing (170) comprising a first screw gear (171) provided at the drive shaft (111) and a second screw gear (172) provided at a main shaft (125) of the gearbox (120). 5. The cathode drive unit (100) of claim 4, the main shaft (125) further comprising a first shaft worm gear (126) interacting with a first worm wheel (127) connected to the first output shaft (121) and a second shaft worm gear (128) interacting with a second worm wheel (129) connected to the second output shaft (122).

6. The cathode drive unit (100) of any of claims 2 to 5, the first gear assembly (140) comprising a screw gear assembly and the second gear assembly (150) comprising a worm gear assembly. 7 The cathode drive unit (100) of claim 1 or 2, the gearbox (120) being connected to the drive shaft (111) via a worm gear pairing (180). 8. The cathode drive unit (100) of claim 7, the worm gear pairing (180) comprising a first worm gear (181) provided at the drive shaft (111) and two second worm gears (182) interacting with the first worm gear (181), particularly the first worm gear (181) having a single worm tooth. 9. The cathode drive unit (100) of claim 2 and any of claims 7 or 8, the first gear assembly (140) comprising a worm gear assembly and the second gear assembly (150) comprising a spur gear assembly. 10. The cathode drive unit (100) of any of claims 1 to 9, wherein the first output shaft (121) is connected to a first pulley (161) and the second output shaft (122) is connected to a second pulley (162). 11. A cathode drive unit (100) for a deposition system, comprising - a motor (110) configured for providing a first rotation (R1) of a drive shaft (111), - a gearbox (120) connected to the drive shaft (111), the gearbox (120) being configured for converting the first rotation (R1) into a second rotation (R2) for driving a first rotatable cathode (131) and into a third rotation (R3) for driving a second rotatable cathode (132).

12. A deposition system (200), comprising: - a first rotatable cathode (131); - a second rotatable cathode (132); and - a cathode drive unit (100), comprising - a motor (110) having a drive shaft (111), and - a gearbox (120) connected to the drive shaft (111), the gearbox having a first output shaft (121) for driving the first rotatable cathode (131) and a second output shaft (122) for driving the second rotatable cathode (132). 13. The deposition source (200) of claim 12, wherein the cathode drive unit is a cathode drive unit according to any of claims 1 to 12. 14. A method (300) of operating a deposition system having a first rotatable cathode (131) and a second rotatable cathode (132), the method comprising: - providing (310) a first rotation (R1) of a drive shaft of a motor, and - converting (320) the first rotation (R1) into a second rotation (R2) for driving the first rotatable cathode (131) by using the gearbox (120), and - converting (320) the first rotation (R1) into a third rotation (R3) for driving a second rotatable cathode (132) by using the gearbox (120). 15. A method (400) of manufacturing a coated substrate, comprising coating (410)a substrate, particularly a large area substrate by using (420) at least one of cathode drive unit (100) according to any of claims 1 to 11, a deposition system according to claim 12 or 13, and a method of operating a deposition system according to claim 14.

Description:
CATHODE DRIVE UNIT, DEPOSITION SYSTEM, METHOD OF OPERATING A DEPOSITION SYSTEM AND METHOD OF MANUFACTURING A COATED SUBSTRATE TECHNICAL FIELD [0001] Embodiments of the present disclosure relate to material deposition by sputtering from a target. In particular, embodiments of the present disclosure relate to deposition sources having rotatable cathodes. More specifically, embodiments described herein relate to cathode drive units for driving two or more rotatable cathodes of a deposition system. Further, embodiments of the present disclosure relate to methods of operating a deposition system and methods of manufacturing a coated substrate. BACKGROUND [0002] In many applications, it is necessary to deposit thin layers on a substrate. The substrates can be coated in one or more chambers of a coating apparatus. The substrates may be coated in a vacuum, using a vapor deposition technique. [0003] Several methods are known for depositing a material on a substrate. For instance, substrates may be coated by a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process or a plasma enhanced chemical vapor deposition (PECVD) process etc. The process is performed in a process apparatus or process chamber where the substrate to be coated is located. A deposition material is provided in the apparatus. A plurality of materials, and also oxides, nitrides or carbides thereof, may be used for deposition on a substrate. Coated materials may be used in several applications and in several technical fields. For instance, substrates for displays are often coated by a physical vapor deposition (PVD) process. Further applications include insulating panels, organic light emitting diode (OLED) panels, substrates with thin film transistors (TFT), color filters or the like. [0004] For a PVD process, the deposition material can be present in the solid phase as a target. By bombarding the target with energetic particles, atoms of the target material, i.e. the material to be deposited, are ejected from the target. The atoms of the target material are deposited on the substrate to be coated. In a PVD process, the sputter material, i.e. the material to be deposited on the substrate, may be arranged in different ways. For instance, the target may be made of the material to be deposited or may have a backing element on which the material to be deposited is fixed. The target including the material to be deposited is supported or fixed in a predefined position in a deposition chamber. [0005] Segmented or monolithic targets, for example planar or rotatable targets may be used for sputtering. Due to the geometry and design of the cathodes, rotatable targets typically have a higher utilization and an increased operation time than planar ones. The use of rotatable targets may prolong service life and reduces costs. [0006] Cathode drive units for rotating the target and/or the cathode, respectively, are subject to maintenance. Particularly for large area substrates having a plurality of cathodes for depositing material on a substrate, maintenance may be time-consuming. Accordingly, there is a demand for improved cathode drive units, improved deposition systems, and improved methods of operating a deposition system for manufacturing coated substrates, particularly large area substrates. SUMMARY [0007] In light of the above, a cathode drive unit for a deposition system, a deposition system, and a method of operating a deposition system having a first rotatable cathode and a second rotatable cathode according to the independent claims are provided. Additionally, a method of manufacturing a coated substrate, including using at least one of a cathode drive unit, a deposition system, and a method of operating a deposition system according to embodiments described herein is provided. [0008] Further aspects, advantages, and features are apparent from the dependent claims, the description, and the accompanying drawings. [0009] According to an aspect of the present disclosure, a cathode drive unit for a deposition system is provided. The cathode drive unit includes a motor having a drive shaft. Further, the cathode drive unit includes a gearbox connected to the drive shaft. The gearbox includes a first output shaft for driving a first rotatable cathode and a second output shaft for driving a second rotatable cathode. [0010] According to a further aspect of the present disclosure, a cathode drive unit for a deposition system is provided. The cathode drive unit includes a motor configured for providing a first rotation of a drive shaft. Further, the cathode drive unit includes a gearbox connected to the drive shaft. The gearbox is configured for converting the first rotation into a second rotation for driving a first rotatable cathode. Additionally, the gearbox is configured for converting the first rotation into a third rotation for driving a second rotatable cathode. [0011] According to another aspect of the present disclosure, a deposition system is provided. The deposition system includes a first rotatable cathode, a second rotatable cathode, and a cathode drive unit. The cathode drive unit includes a motor having a drive shaft. Additionally, the cathode drive unit includes a gearbox connected to the drive shaft. The gearbox includes a first output shaft for driving the first rotatable cathode and a second output shaft for driving the second rotatable cathode. [0012] According to a further aspect of the present disclosure, a method of operating a deposition system having a first rotatable cathode and a second rotatable cathode is provided. The method includes providing a first rotation of a drive shaft of a motor. Additionally, the method includes converting the first rotation into a second rotation for driving a first rotatable cathode by using a gearbox. Further, the method includes converting the first rotation into a third rotation for driving a second rotatable cathode by using the gearbox. [0013] According to a further aspect of the present disclosure, a method of manufacturing a coated substrate is provided. The method includes using at least one of a cathode drive unit according to any embodiments described herein, a deposition system according to according to any embodiments described herein, and a method of operating a deposition system according to any embodiments described herein. [0014] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus. BRIEF DESCRIPTION OF THE DRAWINGS [0015] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following: FIG. 1 shows a schematic view of a cathode drive unit for a deposition system according to embodiments described herein; FIG. 2 shows a schematic view of a cathode drive unit with further details according to embodiments described herein; FIGS. 3 and 4 show schematic views of exemplary gearbox configurations of a cathode drive unit according to further embodiments described herein; FIG. 5 shows a block diagram for illustrating a method of operating a deposition system according to embodiments described herein; and FIG. 6 shows a block diagram for illustrating a method of manufacturing a coated substrate according to embodiments described herein. DETAILED DESCRIPTION OF EMBODIMENTS [0016] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, same reference numbers refer to same components. Only the differences with respect to individua l embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations. [0017] With exemplary reference to FIG. 1, a cathode drive unit 100 for a deposition system according to the present disclosure is described. According to embodiments which can be combined with any other embodiments described herein, the cathode drive unit 100 includes a motor 110 having a drive shaft 111. Additionally, the cathode drive unit 100 includes a gearbox 120 connected to the drive shaft 111. As exemplarily shown in FIG. 1, the gearbox 120 has a first output shaft 121 for driving a first rotatable cathode 131. Further, the gearbox 120 has a second output shaft 122 for driving a second rotatable cathode 132. [0018] In other words, according to embodiments which can be combined with any other embodiments described herein, the cathode drive unit 100 includes a motor 110 configured for providing a first rotation R1 of a drive shaft 111. Further, the cathode drive unit 100 includes a gearbox 120 connected to the drive shaft 111. The gearbox 120 is configured for converting the first rotation R1 into a second rotation R2 for driving a first rotatable cathode 131. Additionally, the gearbox 120 is configured for converting the first rotation R1 into a third rotation R3 for driving a second rotatable cathode 132. It is to be understood that the first rotation R1, the second rotation R2 and the third rotation R3 may have the same rotational speed and/or the same rotational direction. Alternatively, the first rotation R1, the second rotation R2 and the third rotation R3 may have a different rotational speed and/or a different rotational direction. [0019] Accordingly, with exemplary reference to the embodiment shown in FIG.1, it is to be understood that compared to the state of the art, an improved cathode drive unit is provided. In particular, embodiments of the cathode drive unit as described herein beneficially provide for a quantity reduction of motors for driving multiple rotatable cathodes. More specifically, the cathode drive unit as described herein beneficially provides for the possibility to drive two or more cathodes of a deposition system by employing a single motor. Accordingly, by employing a cathode drive unit according to embodiments described herein, production costs and operational costs of a deposition system can be reduced. [0020] Before various further embodiments of the present disclosure are described in more detail, some aspects with respect to some terms used herein are explained. [0021] In the present disclosure, a “cathode drive unit for a deposition system” can be understood as a unit configured for driving two or more rotatable cathodes of a deposition system. In particular, a “cathode drive unit” as described herein can be understood as a unit including a motor for rotating the two or more rotatable cathodes. Typically, the motor is an electric motor. [0022] In the present disclosure, a “drive shaft” can be understood as an output shaft of a motor, particularly of the motor as described herein. Typically, during operation of the cathode drive unit, the drive shaft is rotated around the longitudinal axis of the drive shaft. In other words, during operation, the motor provides a rotational movement of the drive shaft around the longitudinal axis of the drive shaft. [0023] In the present disclosure, a “gearbox” can be understood as an assembly or system of gears configured for transmitting a driving force from an input of the gearbox to an output of the gearbox. In particular, the “gearbox” as described herein can be understood as a gearbox configured for converting an input rotational movement into two or more output rotational movements. Typically, the input rotational movement is different compared to the two or more output rotational movements, for instance with respect to rotational direction and/or rotational speed. [0024] In the present disclosure, an “output shaft” can be understood as a shaft for providing an output rotational movement of the gearbox as described herein. [0025] In the present disclosure, a “rotatable cathode” can be understood as a cathode configured for being rotatable around the longitudinal axis of the cathode. [0026] With exemplary reference to FIG. 2, according to embodiments which can be combined with any other embodiments described herein, the drive shaft 111 has a first rotational axis 11, the first output shaft 121 has a second rotational axis 12A, and the second output shaft 122 has a third rotational axis 12B. Typically, the second rotational axis 12A and the third rotational axis 12B are substantially perpendicular with respect to the first rotational axis 11. The term “substantially perpendicular” can be understood as being perpendicular with a tolerance T of T ≤ ±15°, particularly T≤ ±10°, more particularly T≤ ±5°, for instance T≤ ±1°. [0027] For instance, the first rotational axis 11 can be substantially horizontal, i.e. horizontal with a tolerance T of T ≤ ±15°, particularly T≤ ±10°, more particularly T≤ ±5°, for instance T≤ ±1°. The second rotational axis 12A can be substantially vertical, i.e. vertical with a tolerance T of T ≤ ±15°, particularly T≤ ±10°, more particularly T≤ ±5°, for instance T≤ ±1°. Further, the third rotational axis 12B can be substantially vertical, i.e. vertical with a tolerance T of T ≤ ±15°, particularly T≤ ±10°, more particularly T≤ ±5°, for instance T≤ ±1°. The vertical direction is defined by the direction of the force of gravity. The horizontal direction is defined as the direction being perpendicular to the vertical direction. [0028] With exemplary reference to FIG. 2, according to embodiments, which can be combined with any other embodiments described herein, the first output shaft 121 is connected to a first pulley 161. Further, typically the second output shaft 122 is connected to a second pulley 162. As exemplarily shown in FIG. 2, typically the first pulley 161 is mechanically coupled with the first rotatable cathode 131, for example via a first belt 13A. In other words, the rotation of the first pulley 161 can be transferred to the first rotatable cathode 131 by employing the first belt 13A, as exemplarily indicated by the arrows around the rotation axis shown in FIG. 2. Accordingly, typically the second pulley 161 is mechanically coupled with the second rotatable cathode 132, for example via a second belt 13B. In other words, the rotation of the second pulley 162 can be transferred to the second rotatable cathode 132 by employing the second belt 13B, as exemplarily indicated by the arrows around the rotation axis shown in FIG. 2. [0029] With exemplary reference to FIG. 3, according to embodiments, which can be combined with any other embodiments described herein, the gearbox 120 includes a first gear assembly 140 and a second gear assembly 150. The first gear assembly 140 interacts with the drive shaft 111. The second gear assembly 150 interacts with the first output shaft 121 and with the second output shaft 122. In the present disclosure, the verb “interact”/”interacting” in connection with elements (e.g. gear assemblies, gears, wheels and shafts) of the embodiments described herein can be understood in that motion, particularly rotational motion, can be transferred or transmitted between the interacting elements (e.g. gear assemblies, gears, wheels and shafts as described herein). Accordingly, the second gear assembly 150 interacting with the first output shaft 121 and with the second output shaft 122 can be understood in that the second gear assembly 150 is configured for transmitting or transferring motion, particularly rotational motion, to the first output shaft 121 and the second output shaft 122. [0030] According to embodiments, which can be combined with any other embodiments described herein, the gearbox 120 is connected to the drive shaft 111 via a screw gear pairing 170, as exemplarily shown in FIG. 3. Typically, the screw gear pairing 170 includes a first screw gear 171 provided at the drive shaft 111 and a second screw gear 172 provided at a main shaft 125 of the gearbox 120, as exemplarily indicated in FIG. 3. Typically , the main shaft 125 includes a first shaft worm gear 126 interacting with a first worm wheel 127. The first worm wheel 127 is connected to the first output shaft 121. Further, the main shaft 125 may include a second shaft worm gear 128 interacting with a second worm wheel 129. The second worm wheel 129 is connected to the second output shaft 122. Accordingly, as exemplarily shown in FIG. 3, the first gear assembly 140 may include a screw gear assembly and the second gear assembly 150 may include a worm gear assembly. A “main shaft” of the gearbox can be understood as a shaft mechanically coupling the first gear assembly 140 with the second gear assembly 150. [0031] As exemplarily shown in FIG. 3, typically the first shaft worm gear 126 and the second shaft worm gear 128 are provided at opposite ends of the main shaft. However, it is to be understood that according to embodiments which can be combined with other embodiments described herein, the main shaft 125 may extend beyond the first shaft worm gear 126 and the second shaft worm gear 128. For example, a third shaft worm gear (not shown) may be provided on the main shaft 125 at a distance with respect to the first shaft worm gear 126. Additionally, a fourth shaft worm gear (not shown) may be provided on the main shaft 125 at a distance with respect to the second shaft worm gear 128. The third shaft worm gear may interact with a third worm wheel (not shown). The third worm wheel can be connected to a third output shaft (not shown). The third output shaft can be connected to a third pulley (not shown) for driving a third rotatable cathode (not shown). Similarly, the fourth shaft worm gear may interact with a fourth worm wheel (not shown). The fourth worm wheel can be connected to a fourth output shaft (not shown). The fourth output shaft can be connected to a fourth pulley (not shown) for driving a fourth rotatable cathode (not shown). Accordingly, it is to be understood that the cathode drive unit may be configured for driving two or more rotatable cathodes, e.g. four rotatable cathodes as described in the above, by using a single motor. [0032] The exemplary embodiment schematically shown in FIG. 3 has the advantages of providing high gear efficiency and high power transfer. [0033] According to embodiments which can be combined with other embodiments described herein, the first screw gear 171 and the second screw gear 172 are configured for providing a gear ratio of 2:1. The gear ratio for the pairing of the first screw gear 171 and the second screw gear 172 can be understood as the number of teeth of the second screw gear 172 divided by the number of teeth of the first screw gear 171. For instance, the first screw gear 171 can have 13 teeth and the second screw gear 172 can have 26 teeth. [0034] According to embodiments which can be combined with other embodiments described herein, the first shaft worm gear 126 and the first worm wheel 127 are configured for providing a gear ratio of 60:1. The gear ratio for the pairing of the first shaft worm gear 126 and the first worm wheel 127 can be understood as the number of teeth of the first worm wheel 127 divided by the number of teeth of the first shaft worm gear 126. For instance, the first shaft worm gear 126 may have a single worm tooth and the first worm wheel 127 may have 60 teeth. [0035] According to embodiments which can be combined with other embodiments described herein, the gear ratio of the first shaft worm gear 126 and the first worm wheel 127 is equal to the gear ratio of the second shaft worm gear 128 and the second worm wheel 129. The gear ratio for the pairing of the second shaft worm gear 128 and the second worm wheel 129 can be understood as the number of teeth of the second shaft worm gear 128 divided by the number of teeth of the second worm wheel 129. For instance, the second shaft worm gear 128 may have a single worm tooth and the second worm wheel 129 may have 60 teeth. However, it is to be understood that the gear ratio of the second shaft worm gear 128 and the second worm wheel 129 can be different from the gear ratio of the first shaft worm gear 126 and the first worm wheel 127. [0036] With exemplary reference to FIG. 4, according to embodiments, which can be combined with any other embodiments described herein, the gearbox 120 is connected to the drive shaft 111 via a worm gear pairing 180. Typically, the worm gear pairing 180 includes a first worm gear 181 provided at the drive shaft 111. In particular, typically the first worm gear 181 is provided by a single worm tooth. The worm gear pairing 180 includes a second worm gear 182 interacting with the first worm gear 181. Further, the worm gear pairing 180 includes a third worm gear 183 interacting with the first worm gear 181. As exemplarily shown in FIG. 4, the second worm gear 182 and the third worm gear 183 may be arranged on opposite sides of the first worm gear 181 provided on the drive shaft 111. In other words, the second worm gear 182 and the third worm gear 183 may be symmetrically arranged with respect to the first rotational axis 11 of the drive shaft 111. Accordingly, the first gear assembly 140 may be a worm gear assembly. [0037] According to embodiments which can be combined with other embodiments described herein, the first worm gear 181 and the second worm gear 182 are configured for providing a gear ration of 60:1. The gear ratio for the pairing of the first worm gear 181 and the second worm gear 182 can be understood as the number of teeth of the second worm gear 182 divided by the number of teeth of the first worm gear 181. For instance, typically the first worm gear 181 has a single worm tooth and the second worm gear 182 may have 60 teeth. [0038] According to embodiments which can be combined with other embodiments described herein, the first worm gear 181 and the third worm gear 183 are configured for providing a gear ration of 60:1. The gear ratio for the pairing of the first worm gear 181 and the third worm gear 183 can be understood as the number of teeth of the third worm gear 183 divided by the number of teeth of the first worm gear 181. For instance, typically the first worm gear 181 has a single worm tooth and the third worm gear 183 may have 60 teeth. [0039] According to embodiments which can be combined with other embodiments described herein, the gear ratio of the pairing of the first worm gear 181 and the third worm gear 183 is equal to the gear ratio of the pairing of the first worm gear 181 and the second worm gear 182. However, it is to be understood that the gear ratio of the pairing of the first worm gear 181 and the third worm gear 183 can be different from the gear ratio of the pairing of the first worm gear 181 and the second worm gear 182. [0040] With exemplary reference to FIG. 4, according to embodiments, which can be combined with any other embodiments described herein, the second gear assembly 150 may be a spur gear assembly. In particular, as exemplarily shown in FIG. 4, the spur gear assembly may include a first spur gear 191 connected with the second worm gear 182, particularly via a shaft. Further, the spur gear assembly may include a second spur gear 192 connected to the third worm gear 183, particularly via a shaft. Additionally, the first spur gear 191 may interact with a third spur gear 193 connected to the first pulley 161, particularly via the first output shaft 121. Further, the second spur gear 192 may interact with a fourth spur gear 194 connected to the second pulley 162, particularly via the second output shaft 122. [0041] According to embodiments which can be combined with other embodiments described herein, the first spur gear 191 and the third spur gear 193 are configured for providing a gear ratio of 2:1. The gear ratio for the pairing of the first spur gear 191 and the third spur gear 193 can be understood as the number of teeth of the third spur gear 193 divided by the number of teeth of the first spur gear 191. For instance, the first spur gear 191 can have 30 teeth and the third spur gear 193 can have 60 teeth. [0042] According to embodiments which can be combined with other embodiments described herein, the second spur gear 192 and the fourth spur gear 194 are configured for providing a gear ratio of 2:1. The gear ratio for the pairing of the second spur gear 192 and the fourth spur gear 194 can be understood as the number of teeth of the fourth spur gear 194 divided by the number of teeth of the second spur gear 192. For instance, the second spur gear 192 can have 30 teeth and the fourth spur gear 194 can have 60 teeth. [0043] According to embodiments which can be combined with other embodiments described herein, the gear ratio of the first spur gear 191 and the third spur gear 193 is equal to the gear ratio of the second spur gear 192 and the fourth spur gear 194. However, it is to be understood that the gear ratio of the first spur gear 191 and the third spur gear 193 can be different from the gear ratio of the second spur gear 192 and the fourth spur gear 194. [0044] With exemplary reference to FIGS. 1 and 2, a deposition system 200 according to the present disclosure is provided. According to embodiments, which can be combined with any other embodiments described herein, the deposition system 200 includes a first rotatable cathode 131, a second rotatable cathode 132, and a cathode drive unit 100. The cathode drive unit 100 includes a motor 110 having a drive shaft 111. Additionally, the cathode drive unit 100 includes a gearbox 120 connected to the drive shaft 111. The gearbox 120 includes a first output shaft 121 for driving the first rotatable cathode 131 and a second output shaft 122 for driving the second rotatable cathode 132. In particular, the cathode drive unit 100 can be a cathode drive unit according any embodiments described herein. [0045] In particular, the deposition system 200 can be a sputter system, particularly for depositing material on large area substrates. In other words, the deposition system 200 as described herein is configured for coating large area substrates using sputtering, particularly PVD sputtering. [0046] The term “substrate” as used herein shall particularly embrace inflexible substrates, e.g., glass plates. The present disclosure is not limited thereto, and the term “substrate” may also embrace flexible substrates such as a web or a foil. Further, also a sensitive substrate may be included. [0047] According to some examples, a large area substrate can be GEN 4.5, which corresponds to about 0.67 m² substrates (0.73x0.92m), GEN 5, which corresponds to about 1.4 m² substrates (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m² substrates (1.95 m x 2.2 m), GEN 8, which corresponds to about 5.3m² substrates (2.16 m x 2.46 m), or even GEN 10, which corresponds to about 9.0 m² substrates (2.88 m × 3.13 m). Even larger generations such as GEN 11, GEN 12 and/or corresponding substrate areas can similarly be implemented. A deposition apparatus according to embodiments described herein may be configured for deposition on large area substrates. [0048] Generally, sputtering can be undertaken as diode sputtering or as magnetron sputtering. Magnetron sputtering is particularly advantageous in that the deposition rates are rather high. By arranging the magnet assembly or magnetron behind the sputter material of the cathode or sputter target, in order to trap the free electrons within the magnetic field, which is generated in the direct vicinity of the target surface, these electrons are forced to move within the magnetic field and cannot escape. This enhances the probability of ionizing the gas molecules typically by several orders of magnitude. This, in turn, increases the deposition rate substantially. For example, in the event of a rotatable sputter target, which may have an essentially cylindrical form, the magnet assembly can be positioned inside the rotatable cathode or sputter target. [0049] Furthermore, sputtering may also be utilized when depositing a material onto a sensitive substrate, e.g. a substrate that has previously been processed. Accordingly, sputtering, and in particular magnetron sputtering can be used as a kind of finishing process to further process the already processed substrate differently. To achieve processing of the sensitive substrate, e.g. a substrate including OLED layers, several adaptations can be made to the sputtering process, e.g. the position of the rotatable sputtering cathodes, i.e. the arrangement and/or orientation of the magnet assemblies of the cathode assembly, can be adapted such that low energy spray coating occurs towards the sensitive substrate. [0050] The term “magnet assembly” as used herein may refer to a unit capable of generating a magnetic field. Typically, the magnet assembly may consist of a permanent magnet. This permanent magnet may be arranged within the cathode or sputter target such that charged particles can be trapped within the generated magnetic field, e.g. in an area above the sputter target. In some embodiments, the magnet assembly includes a magnet yoke. [0051] With exemplary reference to the block diagram shown in FIG. 5, a method 300 of operating a deposition system 200 including a first rotatable cathode 131 and a second rotatable cathode 132 according to the present disclosure is described. According to embodiments, which can be combined with any other embodiments described herein, the method includes providing a first rotation R1 (represented by block 310 in FIG. 5) of a drive shaft of a motor. Further, the method includes converting the first rotation R1 into a second rotation R2 (represented by block 320 in FIG. 5) for driving the first rotatable cathode 131 by using a gearbox 120. Additionally, the method includes converting the first rotation R1 into a third rotation R3 (represented by block 330) for driving the second rotatable cathode 132 by using the gearbox 120. In particular, typically the gearbox 120 is a gearbox of a cathode drive unit according to any embodiments described herein. [0052] With exemplary reference to the block diagram shown in FIG. 6, a method 400 of manufacturing a coated substrate is provided. The method includes coating (represented by block 410 in FIG. 6) a substrate, particularly a large area substrate by using (represented by block 420 in FIG. 6) a cathode drive unit 100 according to any embodiments described herein. Additionally or alternatively, the method includes using a deposition system according to any embodiments described herein. Additionally or alternatively, the method of manufacturing the coated substrate typically includes employing the method of operating a deposition system according to any embodiments described herein. [0053] As an example, coating (represented by block 410 in FIG. 6) may include sputtering of conductive or semi-conductive materials. For example, coating may include sputtering a transparent conductive oxide film onto a substrate as described herein. According to other examples, coating may include sputtering of materials like ITO, IZO, IGZO or MoN. Further, coating may include sputtering of silver (Ag), Ag alloys and/or magnesium (Mg). Further exemplarily, coating may include sputtering of metallic material. Thus, sputtering may be utilized for the deposition of electrodes, particularly transparent electrodes in displays, particularly OLED displays, liquid crystal displays, and touchscreens. Further, sputtering may be utilized for the deposition of electrodes, particularly transparent electrodes in thin film solar cells, photodiodes, and smart or switchable glass. [0054] It is to be understood that for coating the substrate, the substrate can be continuously moved during coating past the cathode assembly having rotatable cathodes (“dynamic coating”). Alternatively, the substrate may rest essentially at a constant position during coating (“static coating”). Further, also substrate sweeping or substrate wobbling may be possible. The embodiments described in the present disclosure relate to both dynamic coating and static coating processes. [0055] In view of the above, it is to be understood that compared to the state of the art, embodiments of the present disclosure beneficially provide an improved cathode drive unit, an improved deposition system, an improved method of operating a deposition system and an improved method of manufacturing a coated substrate. In particular, embodiments of the present disclosure beneficially provide for a quantity reduction of motors for driving multiple rotatable cathodes, a reduction of equipment costs, a reduction of production costs of coated substrate, and a reduction of operational costs. [0056] While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope, and the scope is determined by the claims that follow.