Title:
CAVITY STRUCTURE OF BULK ACOUSTIC RESONATOR, AND MANUFACTURING PROCESS
Document Type and Number:
WIPO Patent Application WO/2022/000153
Kind Code:
A1
Abstract:
A cavity (201) structure of a bulk acoustic resonator, and a manufacturing process. The cavity structure comprises a substrate (101) and cavities (201) formed in the substrate (101), wherein supporting layers (301) are arranged on the substrate (101) to form the cavities (201) in an enclosed manner; release channels (401) that are in communication with the cavities (201) are formed on the same layer as the cavities (201) above the substrate (101); and the release channels (401) extend, in parallel to the substrate (101), around the cavities (201). The staggered release channels (401) can be designed according to the distribution positions of resonators. A release hole does not need to be made, thereby simplifying the manufacturing process for a resonator, and further avoiding the weakening of the performance of the resonator caused by the structure of piezoelectric layers (701) around electrode layers being damaged when the release hole is made. In addition, the shapes of the release channels (401) around the electrode layers can be designed such that the stress of the piezoelectric layers (701) around the electrode layers is adjusted, and the effect of improving the performance of the resonators can be achieved. Therefore, the release of the cavities (201) can be completed without damaging the structure of the piezoelectric layers (701), and the stress of the piezoelectric layers (701) can also be adjusted by means of the structural design of the cavities (201).
Inventors:
LI LINPING (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)
Application Number:
PCT/CN2020/098696
Publication Date:
January 06, 2022
Filing Date:
June 29, 2020
Export Citation:
Assignee:
HANGZHOU JWL TECH INC (CN)
International Classes:
H03H9/02; H03H9/15
Foreign References:
| CN111342799A | 2020-06-26 | |||
| CN108964631A | 2018-12-07 | |||
| CN110350885A | 2019-10-18 | |||
| CN109802649A | 2019-05-24 | |||
| JP2018007230A | 2018-01-11 |
Other References:
See also references of EP 4160916A4
Attorney, Agent or Firm:
XIAMEN FEBE INTELLECTUAL PROPERTY AGENCY GP (CN)
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