Title:
CENTER MISALIGNMENT DETECTION DEVICE AND CENTER MISALIGNMENT DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/168068
Kind Code:
A1
Abstract:
The purpose of the invention is to detect, with high accuracy, center misalignment, with respect to a rotary unit, of a workpiece having an outer peripheral part in which protrusions and recesses are provided periodically and repeatedly in a rotationally symmetric shape about a symmetry axis. The invention comprises: an image-capturing unit that captures, as a detection image, an image over φ degrees (90° ≤ φ) of an outer peripheral part of a workpiece that is rotated by a rotary unit; an edge waveform derivation unit that finds an edge waveform representing the shape of the outer peripheral part of the workpiece included in the detection image; and a center misalignment calculation unit that finds center misalignment of the workpiece with respect to the rotary unit on the basis of the edge waveform derived by the edge waveform derivation unit.
Inventors:
SAKUYAMA TSUTOMU (JP)
SASA YASUSHI (JP)
OTSUKI SHOHEI (JP)
SASA YASUSHI (JP)
OTSUKI SHOHEI (JP)
Application Number:
PCT/JP2017/040739
Publication Date:
September 20, 2018
Filing Date:
November 13, 2017
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
G01B11/27; G01N21/95; G06T7/00
Foreign References:
| JP2002280440A | 2002-09-27 | |||
| JPH07253375A | 1995-10-03 | |||
| JPS5567604A | 1980-05-21 | |||
| JP2013015336A | 2013-01-24 | |||
| JPH10253332A | 1998-09-25 | |||
| US20100138006A1 | 2010-06-03 | |||
| US5452521A | 1995-09-26 |
Attorney, Agent or Firm:
FURIKADO, Shoichi et al. (JP)
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