Title:
CENTRIFUGAL SINTERING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2004/060593
Kind Code:
A1
Abstract:
A centrifugal sintering system imparting a centrifugal force field and a temperature field to a molding of ceramics or metal powder or a ceramic precursor film, characterized in that a rotor for turning a sample holder, a shaft or the sample holder used in the centrifugal sintering system is composed of ceramics. The ceramic member and the rotor for turning the sample holder are composed of conductive silicon carbide ceramics and a sample is heated indirectly by self heating only the rotor selectively using an induction heating means. The ceramics member and the sample holder are composed of a material having a large dielectric loss, and the sample is heated indirectly by heating only the sample holder selectively using a dielectric heating means.
Inventors:
WATARI KOJI (JP)
KINEMUCHI YOSHIAKI (JP)
UCHIMURA SHOJI (JP)
ISHIGURO HIROHIDE (JP)
MORIMITSU HIDEKI (JP)
KINEMUCHI YOSHIAKI (JP)
UCHIMURA SHOJI (JP)
ISHIGURO HIROHIDE (JP)
MORIMITSU HIDEKI (JP)
Application Number:
PCT/JP2003/016742
Publication Date:
July 22, 2004
Filing Date:
December 25, 2003
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
SINTO V CERAX LTD (JP)
WATARI KOJI (JP)
KINEMUCHI YOSHIAKI (JP)
UCHIMURA SHOJI (JP)
ISHIGURO HIROHIDE (JP)
MORIMITSU HIDEKI (JP)
SINTO V CERAX LTD (JP)
WATARI KOJI (JP)
KINEMUCHI YOSHIAKI (JP)
UCHIMURA SHOJI (JP)
ISHIGURO HIROHIDE (JP)
MORIMITSU HIDEKI (JP)
International Classes:
C04B35/64; B22F3/00; C04B35/10; C04B35/48; C04B35/575; F27B17/00; H01L21/687; (IPC1-7): B22F3/06
Foreign References:
| EP1219580A2 | 2002-07-03 | |||
| JPH1192294A | 1999-04-06 | |||
| JPH10212182A | 1998-08-11 | |||
| JPH1087370A | 1998-04-07 | |||
| JPH09221367A | 1997-08-26 |
Other References:
See also references of EP 1595624A4
Attorney, Agent or Firm:
Sudo, Masahiko (6-1 Nihonbashi-Muromachi 1-chom, Chuo-ku Tokyo, JP)
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