Title:
CERAMIC HEATER WITH SHAFT
Document Type and Number:
WIPO Patent Application WO/2021/002169
Kind Code:
A1
Abstract:
The ceramic heater with a shaft is provided with: a ceramic plate in which a resistance heat-generating body is embedded; a hollow ceramic shaft joined at the upper end to the surface of the ceramic plate on the opposite side from a wafer mounting surface of the ceramic plate; and a shaft heating part embedded in a sidewall section on the upper end side of the ceramic shaft.
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Inventors:
AIKAWA KENICHIRO (JP)
TAKEBAYASHI HIROSHI (JP)
KUNO TATSUYA (JP)
TAKEBAYASHI HIROSHI (JP)
KUNO TATSUYA (JP)
Application Number:
PCT/JP2020/022836
Publication Date:
January 07, 2021
Filing Date:
June 10, 2020
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H05B3/06; H01L21/02; H01L21/683; H05B3/18; H05B3/28; H05B3/74
Foreign References:
| JP2016536803A | 2016-11-24 | |||
| JP2008218752A | 2008-09-18 | |||
| JP2005340043A | 2005-12-08 | |||
| JP2008527746A | 2008-07-24 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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