Title:
CERAMIC HEATER
Document Type and Number:
WIPO Patent Application WO/2021/111771
Kind Code:
A1
Abstract:
A ceramic heater 20 comprises: a ceramic plate 21; a cylindrical shaft 26; and a conductive film 30. The ceramic plate 21 comprises, on the surface thereof, a wafer mounting face 21a. Plasma electrodes 22 and heater electrodes 24 are embedded in that order in the ceramic plate so as to be spaced apart from each other, and are embedded from the side closer to the wafer mounting face 21a. The cylindrical shaft 26 supports the ceramic plate 21 from the back surface 21b of the ceramic plate 21. The conductive film (corresponding to the flat shield part of the present invention) 30 is provided in an annular region that excludes the cylindrical shaft 26 in the back surface 21b of the ceramic plate 21. The conductive film 30 is connected to a metal part 28 (ground) via a conductive wire 31 that is provided, along an up-down direction, on the outer wall of the cylindrical shaft 26.
Inventors:
HARA TOMOHIRO (JP)
UNNO YUTAKA (JP)
UNNO YUTAKA (JP)
Application Number:
PCT/JP2020/040362
Publication Date:
June 10, 2021
Filing Date:
October 28, 2020
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H05B3/14; H01L21/205; H01L21/683; H05B3/28; H05B3/48
Domestic Patent References:
| WO2019225519A1 | 2019-11-28 | |||
| WO2019188496A1 | 2019-10-03 |
Foreign References:
| US20170306494A1 | 2017-10-26 | |||
| JP2018123348A | 2018-08-09 | |||
| JP2011061040A | 2011-03-24 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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