CERAMIC LAMINATE - NIPPON STEEL & SUMITOMO METAL CORP

Title:

CERAMIC LAMINATE

Document Type and Number:

WIPO Patent Application WO/2017/150572

Kind Code:

A1

Abstract:

Provided is a ceramic laminate which has excellent mechanical characteristics, heat dissipation properties, insulation properties, heat resistance and reaction resistance, in particular, an insulating heat dissipation element which has excellent heat cycle reliability and high insulation withstand voltage. A ceramic laminate 1 according to the present invention comprises a ceramic film 3 that is formed on a metal layer 2; and the ceramic film 3 has a minimum film thickness of 1 μm or more, while containing silicon nitride and unavoidable impurities. The crystal grains of the silicon nitride have an average grain size of 300 nm or less in the film thickness direction, while having an average grain size of 500 nm or less in the in-plane direction. Consequently, the present invention is able to provide a ceramic laminate which has excellent mechanical characteristics, heat dissipation properties, insulation properties, heat resistance and reaction resistance, in particular, an insulating heat dissipation element which has excellent heat cycle reliability and high insulation withstand voltage.

Inventors:

TOKUHASHI KEISUKE (JP)
KIMURA KEIICHI (JP)
UNO TOMOHIRO (JP)
SATO YUTAKA (JP)

Application Number:

PCT/JP2017/007981

Publication Date:

September 08, 2017

Filing Date:

February 28, 2017

Export Citation:

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Assignee:

NIPPON STEEL & SUMITOMO METAL CORP (JP)

International Classes:

C23C24/04; B32B15/04; H01B1/02; H01B3/12; H01B5/14; H01L23/36

Domestic Patent References:

WO2015005390A1	2015-01-15
WO2012090543A1	2012-07-05

Foreign References:

JP2002239682A	2002-08-27
JP2013071864A	2013-04-22
JPH09175900A	1997-07-08
JP3784341B2	2006-06-07
JP2015045085A	2015-03-12
JP2007305772A	2007-11-22
JP2000114425A	2000-04-21
JPS5245405B2	1977-11-16

Other References: