CERAMIC, PROBE GUIDANCE COMPONENT, PROBE CARD, AND PACKAGE INSPECTING SOCKET

Title:

CERAMIC, PROBE GUIDANCE COMPONENT, PROBE CARD, AND PACKAGE INSPECTING SOCKET

Document Type and Number:

WIPO Patent Application WO/2019/093370

Kind Code:

A1

Abstract:

This ceramic includes, in mass%, 20.0-60.0% of Si3N4, 25.0-70.0% of ZrO2, and 5.0-15.0% of at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5. The ceramic has a thermal expansion coefficient similar to that of silicon, exhibits excellent mechanical strength, can be processed on a fine scale with high accuracy, and is capable of inhibiting the formation of particles.

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Inventors:

YAMAGISHI WATARU (JP)
MORI KAZUMASA (JP)
ETO SHUNICHI (JP)

Application Number:

PCT/JP2018/041330

Publication Date:

May 16, 2019

Filing Date:

November 07, 2018

Export Citation:

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Assignee:

FERROTEC CERAMICS CORP (JP)

International Classes:

C04B35/488; C04B35/589; G01R1/073; G01R31/26; H01L21/66

Domestic Patent References:

WO2002082592A1

2002-10-17

Foreign References:

JP2005119941A	2005-05-12
JPS645975A	1989-01-10
JPS6433072A	1989-02-02
JP2005226031A	2005-08-25

Other References: