Title:
CERAMIC SINTERED BODY AND MEMBER FOR PLASMA TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/004563
Kind Code:
A1
Abstract:
The ceramic sintered body according to the present disclosure contains yttrium oxide as a main component and yttrium silicate, wherein the ratio (I1/Io) of the maximum peak strength I1 of yttrium silicate at a diffraction angle 2θ of 30°-32° with respect to the maximum peak strength Io of yttrium oxide at a diffraction angle 2θ of 28°-30°, determined by an X-ray diffraction technique, is 0.03-0.12. The member for a plasma treatment device according to the present disclosure comprises the ceramic sintered body according to the present disclosure, is in the shape of a cylinder, the inside of which serves as a flow path of a gas for generating a plasma. The inner circumferential surface of the cylinder contains more yttrium silicate than the outer circumferential surface of the cylinder.
Inventors:
TANAKA MANPEI (JP)
Application Number:
PCT/JP2019/025653
Publication Date:
January 02, 2020
Filing Date:
June 27, 2019
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
C04B35/505; C04B35/44; H01L21/3065
Domestic Patent References:
| WO2013065666A1 | 2013-05-10 |
Foreign References:
| JP2008260651A | 2008-10-30 | |||
| JP2005097685A | 2005-04-14 | |||
| JP2001181042A | 2001-07-03 |
Other References:
See also references of EP 3816136A4
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