Title:
CERAMIC SUBSTRATE, LAMINATE, AND SAW DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/159393
Kind Code:
A1
Abstract:
This ceramic substrate is formed from a polycrystalline ceramic and has a supporting main surface. The supporting main surface has a roughness of 0.01 nm to 3.0 nm, in terms of Sa. On the supporting main surface, in a square region that is 50 μm per side, there are, on average, less than 5 convexities/concavities of at least 1 nm, and, on average, less than 1 convexity/concavity of at least 2 nm.
Inventors:
GESHI KEIICHIRO (JP)
NAKAYAMA SHIGERU (JP)
NAKAYAMA SHIGERU (JP)
Application Number:
PCT/JP2016/062959
Publication Date:
October 06, 2016
Filing Date:
April 26, 2016
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES (JP)
International Classes:
C04B37/00; C04B35/111; H03H9/25
Domestic Patent References:
| WO2011034136A1 | 2011-03-24 | |||
| WO2012033125A1 | 2012-03-15 | |||
| WO2014027538A1 | 2014-02-20 | |||
| WO2015186560A1 | 2015-12-10 |
Foreign References:
| JPH11116397A | 1999-04-27 | |||
| JPH07122960A | 1995-05-12 |
Attorney, Agent or Firm:
NAKATA, Motomi et al. (JP)
Nakada Motoki (JP)
Nakada Motoki (JP)
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