Title:
CERAMIC SUBSTRATE AND SUSCEPTOR
Document Type and Number:
WIPO Patent Application WO/2019/189600
Kind Code:
A1
Abstract:
A ceramic substrate produced using a dielectric material containing silicon carbide particles as a forming material, wherein the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than that in a cross section of the substrate.
More Like This:
Inventors:
KOSAKAI MAMORU (JP)
HIDAKA NOBUHIRO (JP)
KIMURA NAOTO (JP)
KUGIMOTO HIRONORI (JP)
HIDAKA NOBUHIRO (JP)
KIMURA NAOTO (JP)
KUGIMOTO HIRONORI (JP)
Application Number:
PCT/JP2019/013652
Publication Date:
October 03, 2019
Filing Date:
March 28, 2019
Export Citation:
Assignee:
SUMITOMO OSAKA CEMENT CO LTD (JP)
International Classes:
C04B35/117; H01L21/205; H01L21/3065; H01L21/683; H02N13/00
Domestic Patent References:
WO2002024605A1 | 2002-03-28 |
Foreign References:
JP2003152065A | 2003-05-23 | |||
US20170140970A1 | 2017-05-18 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
Download PDF: