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Patent Searching and Data


Title:
CERAMIC SUBSTRATE AND SUSCEPTOR
Document Type and Number:
WIPO Patent Application WO/2019/189600
Kind Code:
A1
Abstract:
A ceramic substrate produced using a dielectric material containing silicon carbide particles as a forming material, wherein the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than that in a cross section of the substrate.

Inventors:
KOSAKAI MAMORU (JP)
HIDAKA NOBUHIRO (JP)
KIMURA NAOTO (JP)
KUGIMOTO HIRONORI (JP)
Application Number:
PCT/JP2019/013652
Publication Date:
October 03, 2019
Filing Date:
March 28, 2019
Export Citation:
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Assignee:
SUMITOMO OSAKA CEMENT CO LTD (JP)
International Classes:
C04B35/117; H01L21/205; H01L21/3065; H01L21/683; H02N13/00
Domestic Patent References:
WO2002024605A12002-03-28
Foreign References:
JP2003152065A2003-05-23
US20170140970A12017-05-18
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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