Title:
CERAMIC TUBE
Document Type and Number:
WIPO Patent Application WO/2020/090426
Kind Code:
A1
Abstract:
A ceramic tube containing yttrium oxide as a main component, wherein the cut level difference (Rδc) in a roughness curve of an inner peripheral surface, which represents the difference between the cut level at a load length ratio of 25% in the roughness curve and the cut level at a load length ratio of 75% in the roughness curve, is 2 μm or less and the variation coefficient of the cut level difference (Rδc) is 0.05 to 0.6.
Inventors:
TANAKA MANPEI (JP)
Application Number:
PCT/JP2019/040333
Publication Date:
May 07, 2020
Filing Date:
October 11, 2019
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
C04B35/505; B28B1/24; C04B35/626; H01L21/3065
Foreign References:
| JP2008260644A | 2008-10-30 | |||
| JP2012054266A | 2012-03-15 | |||
| JP2005335991A | 2005-12-08 | |||
| JP2007063595A | 2007-03-15 |
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
Download PDF: