Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CHAMBER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/216847
Kind Code:
A1
Abstract:
A chamber device according to one aspect of the present invention is provided with a chamber (18) in the interior of which plasma is generated, a light source (52), and an incidence window (61) through which light generated by the light source (52) is transmitted into the chamber. The incidence window (61) has a first surface (61C) facing the outer side of the chamber (18), and a second surface (61D) facing the inner side of the chamber, at least the second surface (61D) not being coated with an anti-reflection film, and the second surface (61D) being disposed inclined at a non-perpendicular angle in relation to the optical axis of the light from the light source (52).

Inventors:
HORI, Tsukasa (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2016/067548
Publication Date:
December 21, 2017
Filing Date:
June 13, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
H05G2/00
Domestic Patent References:
WO2007096965A12007-08-30
Foreign References:
JP2002008891A2002-01-11
JPH09213496A1997-08-15
JP2007249092A2007-09-27
JP2008085075A2008-04-10
JP2012134447A2012-07-12
JP2011082473A2011-04-21
Attorney, Agent or Firm:
MATSUURA, Kenzo (Matsuura & Associates, P.O. Box 176 Shinjuku Sumitomo Bldg. 23F, 6-1, Nishi-shinjuku 2-chome, Shinjuku-k, Tokyo 23, 〒1630223, JP)
Download PDF: