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Title:
CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/061212
Kind Code:
A1
Abstract:
[Problem] To prevent oxidation of molten tin in a chamber device that includes a chamber, and a target generation device for supplying tin, i.e., a target material, to a predetermined region in the chamber. [Solution] Disclosed is a chamber device that includes: a chamber (1); a target generation device that is provided with a tank section (32) for storing tin T, temperature variable devices (33, 38) for changing the temperature of the tin T in the tank section (32), a pressure regulator (31) for changing the pressure in the tank section (32), and a nozzle section (34) for jetting the liquid tin T; a gas supply source (40) for supplying a gas to the inside of the chamber (1), said gas containing hydrogen gas; an exhaust device (46) for releasing a gas from the inside of the chamber (1); and a control unit (2) for controlling target generation. The control unit (2) controls the exhaust device (46) such that the oxygen partial pressure in the chamber (1) is 4×10-5 Pa or lower.

Inventors:
ISHIHARA, Takanobu (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2016/079166
Publication Date:
April 05, 2018
Filing Date:
September 30, 2016
Export Citation:
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Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
JP2010199560A2010-09-09
JP2010135557A2010-06-17
JP2014154698A2014-08-25
JP2007201460A2007-08-09
JP2011082551A2011-04-21
JP2013201118A2013-10-03
Attorney, Agent or Firm:
YANAGIDA, Masashi et al. (YANAGIDA & Associates, 7F Shin-Yokohama KS Bldg., 3-18-3, Shin-Yokohama, Kohoku-ku, Yokohama-sh, Kanagawa 33, 〒2220033, JP)
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