Title:
CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/061212
Kind Code:
A1
Abstract:
[Problem] To prevent oxidation of molten tin in a chamber device that includes a chamber, and a target generation device for supplying tin, i.e., a target material, to a predetermined region in the chamber. [Solution] Disclosed is a chamber device that includes: a chamber (1); a target generation device that is provided with a tank section (32) for storing tin T, temperature variable devices (33, 38) for changing the temperature of the tin T in the tank section (32), a pressure regulator (31) for changing the pressure in the tank section (32), and a nozzle section (34) for jetting the liquid tin T; a gas supply source (40) for supplying a gas to the inside of the chamber (1), said gas containing hydrogen gas; an exhaust device (46) for releasing a gas from the inside of the chamber (1); and a control unit (2) for controlling target generation. The control unit (2) controls the exhaust device (46) such that the oxygen partial pressure in the chamber (1) is 4×10-5 Pa or lower.
Inventors:
ISHIHARA TAKANOBU (JP)
Application Number:
PCT/JP2016/079166
Publication Date:
April 05, 2018
Filing Date:
September 30, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
| JP2010199560A | 2010-09-09 | |||
| JP2010135557A | 2010-06-17 | |||
| JP2014154698A | 2014-08-25 | |||
| JP2007201460A | 2007-08-09 | |||
| JP2011082551A | 2011-04-21 | |||
| JP2013201118A | 2013-10-03 |
Attorney, Agent or Firm:
YANAGIDA, Masashi et al. (JP)
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