CHAMBER AND MANUFACTURING METHOD THEREFOR

WIPO Patent Application WO/2016/003015

A1

The present invention relates to a chamber and a manufacturing method therefor, which weld constituent elements forming the chamber by using friction stir welding, thereby promoting the shortening of manufacturing time and the reduction of production costs by simplifying a manufacturing process, and remarkably lowering the occurrence of defects on a welded part, the method comprising the steps of: (S1) preparing four corner members provided in a vertical square bar shape and a plurality of side wall members provided in a vertical plate shape; (S2) forming connecting means at each of the corner members and each of the side wall members; (S3) forming a square wall body, of which the inner part is hollow and the upper and lower parts are open, by sequentially connecting the corner members and the side wall members by using the connecting means and friction stir welding joint parts of the corner members and the side wall members; and (S4) cutting the upper and lower parts of the square wall body to be suitable for the height of the chamber to be manufactured.

KIM JOO HO (KR)
NOH JOONG SUK (KR)
KIM DONG KYOU (KR)
JOO YOUNG HWAN (KR)
LEE WON CHEON (KR)
JUNG YOON CHUL (KR)
SO BYUNG HO (KR)
KIM SUN YOUNG (KR)

PCT/KR2014/009016

January 07, 2016

September 26, 2014

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TAEKWANG TECH CO LTD (KR)
ULVAC KOREA (KR)

H01L21/02

KR20130009077A	2013-01-23
KR20080057960A	2008-06-25
KR101049087B1	2011-07-15
JP2001239375A	2001-09-04

NA, Dong Kyu (KR)
나동규 (KR)

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