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Title:
A CHARACTERIZATION AND DRIVING METHOD BASED ON THE SECOND HARMONIC, WHICH IS ENHANCING THE QUALITY FACTOR AND REDUCING THE FEEDTHROUGH CURRENT IN VARYING GAP ELECTROSTATIC MEMS RESONATORS
Document Type and Number:
WIPO Patent Application WO/2019/013719
Kind Code:
A3
Abstract:
The invention subject to the application is related to a new, feedthrough-current-eliminating and high-quality-factor characterization and drive method for electrostatically driven, varying gap MEMS resonators.

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Inventors:
KULAH HALUK (TR)
ZORLU OZGE (TR)
KANGUL MUSTAFA (TR)
AYDIN EREN (TR)
GOKCE FURKAN (TR)
Application Number:
PCT/TR2017/050494
Publication Date:
May 02, 2019
Filing Date:
October 12, 2017
Export Citation:
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Assignee:
KULAH HALUK (TR)
International Classes:
H03B5/30; H03H9/02
Foreign References:
US20120068776A12012-03-22
US20100283353A12010-11-11
US20070091971A12007-04-26
US20030052742A12003-03-20
Other References:
See also references of EP 3529853A4
Attorney, Agent or Firm:
YALCINER, Ugur G. (YALCINER PATENT & CONSULTING LTD.) (TR)
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