Title:
CHARGE RELAXATION SYSTEM, DEVICE HAVING SAME, AND CHARGE RELAXATION METHOD
Document Type and Number:
WIPO Patent Application WO/2024/034231
Kind Code:
A1
Abstract:
Provided are a charge relaxation system, a device having the same, and a charge relaxation method capable of easily and quickly eliminating electric charges. In order to achieve the aforementioned purpose, this charge relaxation system for controlling the amount of electric charges on a target insulator is configured to include: a pulse power supply capable of applying a pulse voltage to the insulator or an electrode on the periphery thereof; a pulse power supply control unit for controlling the pulse power supply with a parameter indicating a combination of the applied voltage width and the applied time width of a pulse voltage; an ammeter for measuring the amount of electric charge flowing in the insulator due to the pulse voltage applied by the pulse power supply; and a storage unit for storing the relationship between the combination of the applied voltage width and the applied time width of the pulse voltage applied to the insulator or the electrode on the periphery thereof and the amount of electric charge measured by the ammeter.
Inventors:
TERAO NAHO (JP)
YOKOSUKA TOSHIYUKI (JP)
MORITA HIROSHI (JP)
KOTSUJI HIDEYUKI (JP)
YOKOSUKA TOSHIYUKI (JP)
MORITA HIROSHI (JP)
KOTSUJI HIDEYUKI (JP)
Application Number:
PCT/JP2023/019827
Publication Date:
February 15, 2024
Filing Date:
May 29, 2023
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H01J37/244; H01J37/20; H01J37/248; H05F3/02
Foreign References:
| JP2010118564A | 2010-05-27 | |||
| JPH05225942A | 1993-09-03 | |||
| JP2009246012A | 2009-10-22 | |||
| JPH076728A | 1995-01-10 | |||
| KR20060064214A | 2006-06-13 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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