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Title:
CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ADJUSTING CHARGED PARTICLE BEAM APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/173241
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a charged particle beam apparatus that performs apparatus adjustment based on a proper evaluation of a beam. To achieve the abovementioned purpose, with the present invention, proposed is a charged particle beam apparatus comprising: an irradiation optical system including a lens for converging charged particle beams emitted from a charged particle source; and an imaging optical system for imaging on an imaging element the charged particles obtained by irradiating the charged particle beams toward a sample, wherein the charged particle beam apparatus comprises a control apparatus for controlling the lens, and the control apparatus evaluates for each lens condition the size of a specific brightness area obtained by the charged particle beam being made to reach the sample, and selects the lens condition for which the size information fulfills a designated condition.

Inventors:
HASEGAWA Masaki (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
OGATA Tomohiko (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
KANEOKA Noriyuki (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
MURAKOSHI Hisaya (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
ONUKI Katsunori (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
Application Number:
JP2017/011907
Publication Date:
September 27, 2018
Filing Date:
March 24, 2017
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
International Classes:
H01J37/10; G01N23/203; G01N23/225; H01J37/04; H01J37/21; H01J37/22; H01J37/29
Foreign References:
JP2007513460A2007-05-24
JP2005181246A2005-07-07
JP2003202217A2003-07-18
JP2008098191A2008-04-24
JP2004227888A2004-08-12
Attorney, Agent or Firm:
TODA Yuji (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
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