Title:
CHARGED-PARTICLE BEAM APPLICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/187118
Kind Code:
A1
Abstract:
This charged-particle beam application device contains a beam separator. The beam separator comprises: a first magnetic pole; a second magnetic pole facing the first magnetic pole; a first electrode and a second electrode extending along the optical axis of a primary beam, and arrayed in a first direction that is orthogonal to the optical axis, on a first surface, which faces the second magnetic pole of the first magnetic pole; and, a third electrode and a fourth electrode extending along the optical axis on a second surface, which faces the first magnetic pole of the second magnetic pole, respectively facing the first electrode and the second electrode.
Inventors:
SHIRASAKI YASUHIRO (JP)
DOBASHI TAKASHI (JP)
ENYAMA MOMOYO (JP)
IKEGAMI AKIRA (JP)
KAWAMOTO YUTA (JP)
DOBASHI TAKASHI (JP)
ENYAMA MOMOYO (JP)
IKEGAMI AKIRA (JP)
KAWAMOTO YUTA (JP)
Application Number:
PCT/JP2018/013901
Publication Date:
October 03, 2019
Filing Date:
March 30, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/05
Foreign References:
| JP2001124713A | 2001-05-11 | |||
| JPH11233062A | 1999-08-27 |
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (JP)
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