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Title:
CHARGED-PARTICLE BEAM APPLICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/187118
Kind Code:
A1
Abstract:
This charged-particle beam application device contains a beam separator. The beam separator comprises: a first magnetic pole; a second magnetic pole facing the first magnetic pole; a first electrode and a second electrode extending along the optical axis of a primary beam, and arrayed in a first direction that is orthogonal to the optical axis, on a first surface, which faces the second magnetic pole of the first magnetic pole; and, a third electrode and a fourth electrode extending along the optical axis on a second surface, which faces the first magnetic pole of the second magnetic pole, respectively facing the first electrode and the second electrode.

Inventors:
SHIRASAKI, Yasuhiro (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
DOBASHI, Takashi (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
ENYAMA, Momoyo (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
IKEGAMI, Akira (24-14 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
KAWAMOTO, Yuta (24-14 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
Application Number:
JP2018/013901
Publication Date:
October 03, 2019
Filing Date:
March 30, 2018
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
International Classes:
H01J37/05
Foreign References:
JP2001124713A2001-05-11
JPH11233062A1999-08-27
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (Urban Toranomon Bldg, 16-4 Toranomon 1-chome, Minato-k, Tokyo 01, 〒1050001, JP)
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